公开(公告)号：US09195054B2

公开(公告)日：2015-11-24

申请号：US13124468

申请日：2009-08-24

申请人： Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

发明人： Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

IPC分类号： H02N1/06 ,  G02B26/08 ,  B81B3/00 ,  H02N1/00

CPC分类号： G02B26/0833 ,  B81B3/004 ,  B81B2201/033 ,  B81B2203/058 ,  G02B26/0841 ,  H02N1/006

摘要： A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

摘要翻译： 描述了用于围绕旋转轴线旋转微机械部件的级联微机械致动器结构。 该结构包括一个扭力弹簧装置，一方面，该弹簧装置附接到安装件，另一方面，微型机械部件可附接到该扭力弹簧装置。 扭转弹簧装置具有沿旋转轴线或平行于旋转轴线延伸的多个扭转弹簧。 该结构包括具有多个旋转驱动器的旋转驱动装置，其连接到扭转弹簧装置，使得每个旋转驱动器对微机械部件围绕旋转轴线的整个旋转角贡献分数。

公开(公告)号：US20110254404A1

公开(公告)日：2011-10-20

申请号：US13124625

申请日：2009-08-24

申请人： Tjalf Pirk ,  Stefan Pinter ,  Michael Krueger ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

发明人： Tjalf Pirk ,  Stefan Pinter ,  Michael Krueger ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

IPC分类号： H02N1/00 ,  H05K13/04

CPC分类号： H02N1/006 ,  Y10T29/49002

摘要： An electrostatic drive is described having an inner frame, at least one intermediate frame, which encloses the inner frame, and an outer frame, which encloses the inner frame and the at least one intermediate frame, each two adjacent frames of the inner, intermediate, and outer frames being connected to one another via at least one spring element, the spring elements, via which each two adjacent frames of the inner, intermediate, and outer frames are connected to one another, being situated in such a way that the longitudinal directions of the spring elements lie on a common longitudinal spring axis, and electrode fingers being situated on frame bars, which are oriented parallel to the longitudinal spring axis, of the inner frame, the at least one intermediate frame, and the outer frame. A manufacturing method for an electrostatic drive, a micromechanical component, and a manufacturing method for a micromechanical component, are also described.

摘要翻译： 描述了一种静电驱动器，其具有内框架，封闭内框架的至少一个中间框架和封闭内框架和至少一个中间框架的外框架，内框架和内框架的每个两个相邻框架， 并且外框架通过至少一个弹簧元件彼此连接，弹簧元件，内框架，中间框架和外框架的每个两个相邻的框架彼此连接，以这样的方式设置：纵向方向 弹簧元件位于公共纵向弹簧轴线上，并且电极指位于内框架，至少一个中间框架和外框架上的平行于纵向弹簧轴线的框架杆上。 还描述了用于静电驱动的制造方法，微机械部件和用于微机械部件的制造方法。

公开(公告)号：US20110147862A1

公开(公告)日：2011-06-23

申请号：US12937093

申请日：2008-11-28

申请人： Tjalf Pirk ,  Stefan Pinter ,  Hubert Benzel ,  Herbert Weber ,  Michael Krueger ,  Robert Sattler ,  Frederic Njikam Njimonzie ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Schelling ,  Christoph Friese

发明人： Tjalf Pirk ,  Stefan Pinter ,  Hubert Benzel ,  Herbert Weber ,  Michael Krueger ,  Robert Sattler ,  Frederic Njikam Njimonzie ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Schelling ,  Christoph Friese

IPC分类号： H01L29/84 ,  B23K11/00

CPC分类号： B81C1/00103 ,  B81B2203/0118 ,  B81B2203/0307

摘要： In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.

摘要翻译： 在具有倾斜结构和相应的制造方法的微机械部件中，该部件包括具有表面的基板; 第一锚，其设置在基板的表面上并且远离基板延伸; 以及至少一个悬臂，其设置在锚固件的侧表面上，并且其倾斜远离锚固件。

公开(公告)号：US08847336B2

公开(公告)日：2014-09-30

申请号：US12937093

申请日：2008-11-28

申请人： Tjalf Pirk ,  Stefan Pinter ,  Hubert Benzel ,  Heribert Weber ,  Michael Krueger ,  Robert Sattler ,  Frederic Njikam Njimonzie ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Schelling ,  Christoph Friese

发明人： Tjalf Pirk ,  Stefan Pinter ,  Hubert Benzel ,  Heribert Weber ,  Michael Krueger ,  Robert Sattler ,  Frederic Njikam Njimonzie ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Schelling ,  Christoph Friese

IPC分类号： H01L29/788 ,  B81C1/00

CPC分类号： B81C1/00103 ,  B81B2203/0118 ,  B81B2203/0307

摘要： In a micromechanical component having an inclined structure and a corresponding manufacturing method, the component includes a substrate having a surface; a first anchor, which is provided on the surface of the substrate and which extends away from the substrate; and at least one cantilever, which is provided on a lateral surface of the anchor, and which points at an inclination away from the anchor.

摘要翻译： 在具有倾斜结构和相应的制造方法的微机械部件中，该部件包括具有表面的基板; 第一锚，其设置在基板的表面上并且远离基板延伸; 以及至少一个悬臂，其设置在锚固件的侧表面上，并且其倾斜远离锚固件。

公开(公告)号：US20110248601A1

公开(公告)日：2011-10-13

申请号：US13124468

申请日：2009-08-24

申请人： Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

发明人： Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

IPC分类号： H02N1/00

CPC分类号： G02B26/0833 ,  B81B3/004 ,  B81B2201/033 ,  B81B2203/058 ,  G02B26/0841 ,  H02N1/006

摘要： A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

摘要翻译： 描述了用于围绕旋转轴线旋转微机械部件的级联微机械致动器结构。 该结构包括一个扭力弹簧装置，一方面，该弹簧装置附接到安装件，另一方面，微型机械部件可附接到该扭力弹簧装置。 扭转弹簧装置具有沿旋转轴线或平行于旋转轴线延伸的多个扭转弹簧。 该结构包括具有多个旋转驱动器的旋转驱动装置，其连接到扭转弹簧装置，使得每个旋转驱动器对微机械部件围绕旋转轴线的整个旋转角贡献分数。

公开(公告)号：US20110199172A1

公开(公告)日：2011-08-18

申请号：US12737894

申请日：2009-08-03

申请人： Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

发明人： Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

IPC分类号： H01F3/00 ,  H01F7/06 ,  B23P11/00

CPC分类号： H01F7/066 ,  G02B26/0841 ,  G02B26/0858 ,  H01F7/0231 ,  H01F7/0273 ,  H02K33/18 ,  Y10T29/49071 ,  Y10T29/49826

摘要： A magnetic yoke (10) having a magnet (12) having a magnetization direction (14) on which a first yoke arm (18a) and a second yoke arm (18b) are mounted in such a way that the magnet (12) and the two yoke arms (18a, 18b) define a yoke intermediate space (20) extending from a front side to a rear side of the magnetic yoke; and first pole shoe (22a) configured on the first yoke arm (18a) and a second pole shoe (22b) configured on the second yoke arm (18b), between which a yoke gap (24) is located; the first pole shoe (22a) having a first width (b1) at a first end (40a) on the front side of the magnetic yoke (10), in parallel to the magnetization direction (14) of the magnet (12), and having a second width (b2) unequal to the first width (b1) at a second end (42a) facing opposite the first end (40a) on the rear side of the magnetic yoke (10), in parallel to the magnetization direction (14) of the magnet (12).

摘要翻译： 具有磁体（12）的磁轭（10）具有磁化方向（14），第一磁轭臂（18a）和第二磁轭臂（18b）安装在磁化方向（14）上，磁体（12）和 两个轭臂（18a，18b）限定从磁轭的前侧延伸到后侧的磁轭中间空间（20）; 以及构造在所述第一轭臂上的第一极靴（22a）和构造在所述第二轭臂（18b）上的第二杆靴，所述第二杆靴位于所述第二轭臂之间; 所述第一极靴（22a）在所述磁轭（10）的前侧的第一端（40a）具有与所述磁体（12）的磁化方向（14）平行的第一宽度（b1），以及 在与磁轭（10）的后侧相对的第一端（40a）的第二端（42a）处，与磁化方向（14）平行地具有与第一宽度（b1）不等的第二宽度（b2） ）磁体（12）。

公开(公告)号：US20110260658A1

公开(公告)日：2011-10-27

申请号：US12998669

申请日：2009-09-24

申请人： Tjalf Pirk ,  Stefan Pinter ,  Joachim Fritz ,  Christoph Friese

发明人： Tjalf Pirk ,  Stefan Pinter ,  Joachim Fritz ,  Christoph Friese

IPC分类号： H01L41/04

CPC分类号： H02N2/14 ,  G02B6/3512 ,  G02B26/0841 ,  H02N1/006

摘要： A method for operating an electrostatic drive having a stator electrode and an actuator electrode which are designed as multilayer electrodes having subunits includes: predeflecting the actuator electrode with respect to the stator electrode from its non-energized starting position into a first end position by applying a first potential to the first stator electrode subunit, and applying a second potential which is different from the first potential to the first actuator electrode subunit, and applying a third potential which is different from the first potential and the second potential, to the second stator electrode subunit and to the second actuator electrode subunit.

摘要翻译： 一种用于操作具有定子电极和致动器电极的静电驱动器的方法，其被设计为具有子单元的多层电极，包括：将致动器电极相对于定子电极从其非通电起始位置预偏转到第一端部位置， 向第一定子电极子单元施加第一电势，向第一致动器电极子单元施加不同于第一电位的第二电位，并向第二定子电极施加与第一电位和第二电位不同的第三电位 子单元和第二致动器电极子单元。

公开(公告)号：US20110090551A1

公开(公告)日：2011-04-21

申请号：US12893778

申请日：2010-09-29

申请人： Tjalf PIRK ,  Stefan Pinter ,  Joachim Fritz ,  Christoph Friese

发明人： Tjalf PIRK ,  Stefan Pinter ,  Joachim Fritz ,  Christoph Friese

IPC分类号： G02B26/08 ,  H02N1/00

CPC分类号： G02B26/0841 ,  B81B3/0059 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/053 ,  H02N1/008

摘要： A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.

摘要翻译： 具有固定地放置在所述安装件上的至少一个定子电极梳的安装的至少一个定子电极梳的微机械组件具有至少两个定子电极指，其中心纵向轴线位于所述定子电极梳的中心平面上，至少一个致动器电极 梳具具有至少两个致动器电极指，以及可移位部件，其连接到所述至少一个致动器电极梳，使得所述可移位部件可使用非零工作电压至少在一个第一位移方向上相对于所述安装而移位， 其施加在所述至少两个定子电极指和所述至少两个致动器电极指之间，所述第一位移方向具有垂直于所述中心平面的一个第一非零方向分量。

公开(公告)号：US08384975B2

公开(公告)日：2013-02-26

申请号：US12893778

申请日：2010-09-29

申请人： Tjalf Pirk ,  Stefan Pinter ,  Joachim Fritz ,  Christoph Friese

发明人： Tjalf Pirk ,  Stefan Pinter ,  Joachim Fritz ,  Christoph Friese

IPC分类号： G02B26/08

CPC分类号： G02B26/0841 ,  B81B3/0059 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/053 ,  H02N1/008

摘要： A micromechanical assembly having a mounting, at least one stator electrode comb, which is fixedly placed on the mounting, having at least two stator electrode fingers, whose central longitudinal axes are on a central plane of the stator electrode comb, at least one actuator electrode comb having at least two actuator electrode fingers, and a displaceable component, which is coupled to the at least one actuator electrode comb so that the displaceable component is displaceable in relation to the mounting at least in one first displacement direction using a nonzero operating voltage, which is applied between the at least two stator electrode fingers and the at least two actuator electrode fingers, the first displacement direction having one first nonzero directional component perpendicular to the central plane.

摘要翻译： 具有固定地放置在所述安装件上的至少一个定子电极梳的安装的至少一个定子电极梳的微机械组件具有至少两个定子电极指，其中心纵向轴线位于所述定子电极梳的中心平面上，至少一个致动器电极 梳具具有至少两个致动器电极指，以及可移位部件，其连接到所述至少一个致动器电极梳，使得所述可移位部件可使用非零工作电压至少在一个第一位移方向上相对于所述安装而移位， 其施加在所述至少两个定子电极指和所述至少两个致动器电极指之间，所述第一位移方向具有垂直于所述中心平面的一个第一非零方向分量。

公开(公告)号：US08629635B2

公开(公告)日：2014-01-14

申请号：US12998669

申请日：2009-09-24

申请人： Tjalf Pirk ,  Stefan Pinter ,  Joachim Fritz ,  Christoph Friese

发明人： Tjalf Pirk ,  Stefan Pinter ,  Joachim Fritz ,  Christoph Friese

IPC分类号： H01L41/04 ,  H02N2/14

CPC分类号： H02N2/14 ,  G02B6/3512 ,  G02B26/0841 ,  H02N1/006

摘要： A method for operating an electrostatic drive having a stator electrode and an actuator electrode which are designed as multilayer electrodes having subunits includes: predeflecting the actuator electrode with respect to the stator electrode from its non-energized starting position into a first end position by applying a first potential to the first stator electrode subunit, and applying a second potential which is different from the first potential to the first actuator electrode subunit, and applying a third potential which is different from the first potential and the second potential, to the second stator electrode subunit and to the second actuator electrode subunit.

摘要翻译： 一种用于操作具有定子电极和致动器电极的静电驱动器的方法，其被设计为具有子单元的多层电极，包括：将致动器电极相对于定子电极从其非通电起始位置预偏转到第一端部位置， 向第一定子电极子单元施加第一电势，向第一致动器电极子单元施加不同于第一电位的第二电位，并向第二定子电极施加与第一电位和第二电位不同的第三电位 子单元和第二致动器电极子单元。