发明申请
- 专利标题: NITRIDE-BASED SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
- 专利标题(中): 基于氮化物的半导体器件及其制造方法
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申请号: US13167064申请日: 2011-06-23
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公开(公告)号: US20110253977A1公开(公告)日: 2011-10-20
- 发明人: Mitsuaki OYA , Toshiya YOKOGAWA , Atsushi YAMADA , Akihiro ISOZAKI
- 申请人: Mitsuaki OYA , Toshiya YOKOGAWA , Atsushi YAMADA , Akihiro ISOZAKI
- 申请人地址: JP Osaka
- 专利权人: PANASONIC CORPORATION
- 当前专利权人: PANASONIC CORPORATION
- 当前专利权人地址: JP Osaka
- 优先权: JP2009-091514 20090403; JPPCT/JP2009/007284 20091225
- 主分类号: H01L33/06
- IPC分类号: H01L33/06 ; H01L29/201 ; H01L21/263
摘要:
A nitride-based semiconductor light-emitting device 100 includes: a GaN substrate 10 with an m-plane surface 12; a semiconductor multilayer structure 20 provided on the m-plane surface 12 of the GaN substrate 10; and an electrode 30 provided on the semiconductor multilayer structure 20. The electrode 30 includes a Zn layer 32 and an Ag layer 34 provided on the Zn layer 32. The Zn layer 32 is in contact with a surface of a p-type semiconductor region of the semiconductor multilayer structure 20.