发明申请
- 专利标题: CAPACITIVE SENSING SYSTEM WITH DIFFERENTIAL PAIRS
- 专利标题(中): 具有差异对的电容式感应系统
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申请号: US12977288申请日: 2010-12-23
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公开(公告)号: US20110254565A1公开(公告)日: 2011-10-20
- 发明人: Guido De Boer , Johnny Johannes Jacobus Van Baar , Kaustubh Prabodh Padhye , Robert Mossel , Niels Vergeer , Stijn Willem Herman Karel Steenbrink
- 申请人: Guido De Boer , Johnny Johannes Jacobus Van Baar , Kaustubh Prabodh Padhye , Robert Mossel , Niels Vergeer , Stijn Willem Herman Karel Steenbrink
- 申请人地址: NL Delft
- 专利权人: Mapper Lithography IP B.V.
- 当前专利权人: Mapper Lithography IP B.V.
- 当前专利权人地址: NL Delft
- 主分类号: G01R27/26
- IPC分类号: G01R27/26 ; G01R35/00
摘要:
A capacitive sensing system comprising two or more capacitive sensors, one or more AC power sources for energizing the capacitive sensors, and a signal processing circuit for processing signals from the sensors. The sensors are arranged in pairs, wherein the one or more AC power sources are arranged to energize a first sensor of a pair of the sensors with an alternating current or voltage 180 degrees out of phase to a current or voltage for a second sensor of the pair of sensors, and wherein a pair of the sensors provides a measuring unit for a single measured distance value, the signal processing circuit receiving an output signal from each sensor of the pair and generating a measured value related to the average distance between the sensors of the pair and the target.
公开/授权文献
- US08638109B2 Capacitive sensing system with differential pairs 公开/授权日:2014-01-28
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