发明申请
- 专利标题: Perpendicular magnetic recording write head with milling defined track width
- 专利标题(中): 垂直磁记录写头具有铣削定义的轨道宽度
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申请号: US12799927申请日: 2010-05-05
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公开(公告)号: US20110273800A1公开(公告)日: 2011-11-10
- 发明人: Kenichi Takano , Yuchen Zhou , Min Li , Joe Smyth
- 申请人: Kenichi Takano , Yuchen Zhou , Min Li , Joe Smyth
- 专利权人: Headway Technologies, Inc.
- 当前专利权人: Headway Technologies, Inc.
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; C23C14/46
摘要:
A main pole layer having at least a leading taper and trimmed pole tip portion is described. The leading taper increases head field up to ≧15000 Oe even for narrow track widths approaching 50 nm. For MAMR applications, a STO and trailing shield are sequentially formed on a trailing pole tip side. Furthermore, full side shields may be added to reduce fringing field. Another embodiment involves including both of a leading taper and trailing taper at the pole tip where leading taper angle is between 20° and 60° and trailing taper angle is from 10° to 45°. A method is provided for forming various embodiments of the present invention. A key feature is that milling depth at an effective neck height distance is greater than or equal to the pole tip thickness. A self aligned STO may be formed by the same ion milling step that defines track width.
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