An object is to scribe a small-sized substrate made of a brittle material with high workability.A plurality of brittle material-made substrates 107a to 107i are arranged on the table 106 while being positioned by their respective positioning pins 109. A recipe data table is prepared in advance for each of the brittle material-made substrates on an individual basis. On the basis of the recipe data table, the brittle material-made substrate and the scribing head are moved relatively to each other to perform inside scribing or outside scribing on each of the substrates. This makes it possible to subject a plurality of substrates to scribing operation at one time under automatic control.