摘要:
[Object] To provide a scribing apparatus with which fine adjustment with a low load is possible, thin films on the solar cell substrate can be shaved off with precision, thin films can be prevented from peeling irregularly, and straight and precise scribe lines can be created.[Means for Achieving Object] A scribing apparatus for thin film solar cells with which the blade of a trench creating tool 4 that is attached to the scribe head 1 is pressed against the surface of a solar cell substrate along a line along which the integrated thin film solar cell substrate W is to be scribed when the trench creating tool 4 is moved over the solar cell substrate W, so that a trench is created in the thin film formed on the surface of the solar cell substrate W, comprising: a tool holder 5 that is attached to the scribe head 1 in such a manner as to be movable upward and downward and holds the trench creating tool 4; an air cylinder 6 for pressuring the tool holder 5 against the surface of the solar cell substrate W; and a spring 7 for pressuring the tool holder 5 upward.
摘要:
An object is to scribe a small-sized substrate made of a brittle material with high workability. A plurality of brittle material-made substrates 107a to 107i are arranged on the table 106 while being positioned by their respective positioning pins 109. A recipe data table is prepared in advance for each of the brittle material-made substrates on an individual basis. On the basis of the recipe data table, the brittle material-made substrate and the scribing head are moved relatively to each other to perform inside scribing or outside scribing on each of the substrates. This makes it possible to subject a plurality of substrates to scribing operation at one time under automatic control.
摘要:
An object is to scribe a small-sized substrate made of a brittle material with high workability.A plurality of brittle material-made substrates 107a to 107i are arranged on the table 106 while being positioned by their respective positioning pins 109. A recipe data table is prepared in advance for each of the brittle material-made substrates on an individual basis. On the basis of the recipe data table, the brittle material-made substrate and the scribing head are moved relatively to each other to perform inside scribing or outside scribing on each of the substrates. This makes it possible to subject a plurality of substrates to scribing operation at one time under automatic control.
摘要:
To be able to accurately adjust an angle using a simple operation when mounting a groove machining tool into a holder, there is provided a groove machining tool for use with a thin-film solar cell. The groove machining tool is retained by a holder, is caused to move together with the holder over a thin film of an integrated thin-film solar cell in one direction, and forms a groove on the thin film extending in one direction and has a tool body. The blade tip part is formed on a tip end of the tool body and has blade tips for machining grooves disposed at a tip end. An angle regulation unit is disposed on the tool body so that the blade tip part is fixed in a predetermined orientation with regard to the direction of formation of the groove when being retained by the holder.
摘要:
A scribing apparatus where the width of a scribe line to be created is easy to adjust is provided. The scribing apparatus is provided with a support means for supporting the substrate of a thin film solar cell, a scribe head for pressing the blade installed at one end against the line to be scribed on one surface of the substrate, and a moving means for moving the scribe head over the substrate. When the scribe head moves over the substrate, a scribe line is created on one surface of the substrate. In the scribe head, the end of the blade is in cylindrical form, and the blade is positioned so that the direction in which the scribe head moves is approximately the same as the direction of the center line of the cylindrical form.
摘要:
There is provided a groove machining tool supported in a holder and caused to move together with the holder in relative fashion along a scheduled scribe line over an integrated thin-film solar cell substrate to form a groove. The groove machining tool includes a tool body supported in the holder, and a blade tip part formed in a distal part of the tool body. The blade tip part includes a blade extending along a direction intersecting a direction of movement of the tool, at a first end along the direction of movement of the tool. The blade is tilted backward from the direction of movement of the tool in relation to a direction orthogonal to the direction of movement of the groove tool, as viewed from a bottom face of the blade tip part.