发明申请
- 专利标题: TARGET OUTPUT DEVICE AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- 专利标题(中): 目标输出装置和极端超紫外光源装置
-
申请号: US13192857申请日: 2011-07-28
-
公开(公告)号: US20110284774A1公开(公告)日: 2011-11-24
- 发明人: Takanobu ISHIHARA , Youichi Sasaki , Kouji Kakizaki , Masahiro Inoue , Takayuki Yabu , Hideo Hoshino
- 申请人: Takanobu ISHIHARA , Youichi Sasaki , Kouji Kakizaki , Masahiro Inoue , Takayuki Yabu , Hideo Hoshino
- 申请人地址: JP Tokyo
- 专利权人: GIGAPHOTON INC.
- 当前专利权人: GIGAPHOTON INC.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2009-128192 20090527; JP2009-173882 20090727; JP2010-016659 20100128
- 主分类号: G21K5/00
- IPC分类号: G21K5/00 ; H05H1/24
摘要:
A target output device may include: a main body for storing a target material; a nozzle unit, connected to the main body, for outputting the target material as a target; an electrode unit provided so as to face the nozzle unit; a voltage control unit that applies predetermined voltage between the electrode unit and the target material to generate electrostatic force therebetween for pulling out the target material through the nozzle unit; a pressure control unit that applies predetermined pressure to the target material; and an output control unit that causes the target to be outputted through the nozzle unit by controlling signal output timing of each of a first timing signal and a second timing signal, the first timing signal causing the voltage control unit to apply the predetermined voltage between the target material and the electrode unit at first timing, and the second timing signal causing the pressure control unit to apply the predetermined pressure to the target material at second timing.