发明申请
US20110291690A1 Apparatus and Method for Testing Non-Contact Pads of a Semiconductor Device to be Tested
有权
用于测试要测试的半导体器件的非接触焊盘的装置和方法
- 专利标题: Apparatus and Method for Testing Non-Contact Pads of a Semiconductor Device to be Tested
- 专利标题(中): 用于测试要测试的半导体器件的非接触焊盘的装置和方法
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申请号: US12784121申请日: 2010-05-20
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公开(公告)号: US20110291690A1公开(公告)日: 2011-12-01
- 发明人: Yi-Shao Lai , Tsung-Yueh Tsai , Ming-Kun Chen , I.L. Lin , Ken Juang , Ming-Hsiang Cheng
- 申请人: Yi-Shao Lai , Tsung-Yueh Tsai , Ming-Kun Chen , I.L. Lin , Ken Juang , Ming-Hsiang Cheng
- 主分类号: G01R31/26
- IPC分类号: G01R31/26
摘要:
The present invention relates to an apparatus and a method for testing non-contact pads of a semiconductor device to be tested. The apparatus includes an insulating body, at least one testing module and a plurality of probes. The insulating body includes an accommodating cavity, a lower opening and at least one side opening. The side opening communicates with the accommodating cavity and the lower opening. The testing module is disposed in the side opening, and each testing module includes a circuit board and an active chip. The active chip is disposed on to and electrically connected to the circuit board. The active chip has a plurality of testing pads exposed to the accommodating cavity. The probes are disposed in the lower opening. Whereby, the non-contact pads of the semiconductor device to be tested face but not in physically contact with the testing pads of the active chip, so as to test the proximity communication between the non-contact pads of the semiconductor device and the testing pads of the active chip.
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