Invention Application
- Patent Title: METHOD OF FORMING THE STRUCTURE OF THERMAL RESISTIVE LAYER
- Patent Title (中): 形成热电阻层结构的方法
-
Application No.: US13213892Application Date: 2011-08-19
-
Publication No.: US20110297550A1Publication Date: 2011-12-08
- Inventor: Jung-Fang Chang , Te-Chi Wong , Chien-Te Hsieh , Chin-Jen Huang , Yu-Hung Chen
- Applicant: Jung-Fang Chang , Te-Chi Wong , Chien-Te Hsieh , Chin-Jen Huang , Yu-Hung Chen
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Priority: TW093133566 20041104
- Main IPC: C25D5/56
- IPC: C25D5/56

Abstract:
The prevent disclosure discloses a structure of thermal resistive layer and the method of forming the same. The thermal resistive structures, formed on a plastic substrate, comprises a porous layer, formed on said plastic substrate, including a plurality of oxides of hollow structure, and a buffer layer, formed on said porous layer, wherein said porous layer can protect said plastic substrate from damage caused by the heat generated during manufacturing process. With the structure and method disclosed above, making a thin film transistor and forming electronic devices on the plastic substrate in the technology of Low Temperature PolySilicon, i.e. LTPS, without changing any parameters is possible.
Information query