Invention Application
US20110297550A1 METHOD OF FORMING THE STRUCTURE OF THERMAL RESISTIVE LAYER 审中-公开
形成热电阻层结构的方法

METHOD OF FORMING THE STRUCTURE OF THERMAL RESISTIVE LAYER
Abstract:
The prevent disclosure discloses a structure of thermal resistive layer and the method of forming the same. The thermal resistive structures, formed on a plastic substrate, comprises a porous layer, formed on said plastic substrate, including a plurality of oxides of hollow structure, and a buffer layer, formed on said porous layer, wherein said porous layer can protect said plastic substrate from damage caused by the heat generated during manufacturing process. With the structure and method disclosed above, making a thin film transistor and forming electronic devices on the plastic substrate in the technology of Low Temperature PolySilicon, i.e. LTPS, without changing any parameters is possible.
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