A motheye mold fabrication method of an embodiment of the present invention includes: (a) anodizing a surface of an aluminum film or aluminum base via an electrode that is in contact with the surface, thereby forming a porous alumina layer which has a plurality of very small recessed portions; (b) after step (a), allowing the porous alumina layer to be in contact with an etchant, thereby enlarging the plurality of very small recessed portions of the porous alumina layer; and (c) after step (b), further anodizing the surface via the electrode to grow the plurality of very small recessed portions. In at least one example embodiment, step (b) is performed in such a controlled state that part of the electrode which is in contact with the surface in the etchant would not be exposed to the etchant. Thus, production of a defect due to nonuniform corrosion can be prevented.