发明申请
- 专利标题: NONVOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING SAME
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US13076910申请日: 2011-03-31
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公开(公告)号: US20110303961A1公开(公告)日: 2011-12-15
- 发明人: Dong-Ryul Chang , Myoung-Kyu Park
- 申请人: Dong-Ryul Chang , Myoung-Kyu Park
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2010-0055663 20100611
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A nonvolatile memory device including a cell array area in which a plurality of unit cells are arranged at least in one direction includes a plurality of memory transistors formed in the respective unit cells. Each memory transistor includes a gate pattern in which a tunnel insulating layer, a floating gate, an inter-gate insulating layer, and a control gate are laminated, and first and second junction areas arranged on opposite sides of the gate pattern, wherein the gate patterns are separated in the one direction by unit cells. The to nonvolatile memory device also includes a first conduction interconnection which extends in the one direction and is arranged in a position that overlaps the control gate and a plurality of first contacts, at least one of which is arranged for each of the control gates to connect the control gates and the first conduction interconnection.
公开/授权文献
- US08866211B2 Nonvolatile memory device and method of manufacturing same 公开/授权日:2014-10-21
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