Invention Application
- Patent Title: EXPOSURE SYSTEM AND ADJUSTMENT METHOD THEREOF
- Patent Title (中): 曝光系统及其调整方法
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Application No.: US12884202Application Date: 2010-09-17
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Publication No.: US20110304838A1Publication Date: 2011-12-15
- Inventor: Chun-Chieh Huang , Yuan-Chin Lee , Chin-Tien Yang , Kuen-Chiuan Cheng , Shuen-Chen Chen , Chih-Yu Chen
- Applicant: Chun-Chieh Huang , Yuan-Chin Lee , Chin-Tien Yang , Kuen-Chiuan Cheng , Shuen-Chen Chen , Chih-Yu Chen
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Priority: TW99119091 20100611
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/32

Abstract:
An exposure system including a first laser light source, a second laser light source, a focusing module, an astigmatism generating element, and a photo detector, and an adjustment method thereof are provided. The first laser light source emits a first laser beam. The second laser light source emits a second laser beam. The focusing module includes a light converging unit disposed on transmission paths of the first laser beam and the second laser beam for projecting the first laser beam and the second laser beam onto a material. The material reflects at least a part of the first laser beam into a first reflective beam. The light converging unit and the astigmatism generating element are disposed on the transmission path of the first reflective beam. The photo detector is disposed on the transmission path of the first reflective beam from the astigmatism generating element.
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