发明申请
- 专利标题： CONSUMABLE ISOLATION RING FOR MOVABLE SUBSTRATE SUPPORT ASSEMBLY OF A PLASMA PROCESSING CHAMBER
- 专利标题（中）： 等离子体加工室的可移动基板支撑组件的消耗隔离环
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申请号： US12828098申请日： 2010-06-30
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公开(公告)号： US20120000605A1公开(公告)日： 2012-01-05
- 发明人: Michael C. Kellogg , Alexei Marakhtanov , Rajinder Dhindsa
- 申请人： Michael C. Kellogg , Alexei Marakhtanov , Rajinder Dhindsa
- 申请人地址： US CA Fremont
- 专利权人： Lam Research Corporation.
- 当前专利权人： Lam Research Corporation.
- 当前专利权人地址： US CA Fremont
- 主分类号： C23F1/08
- IPC分类号： C23F1/08 ; C23C16/00 ; C23C14/34 ; H01L21/306
摘要：
A consumable isolation ring of a movable substrate support assembly is described. The consumable isolation ring is configured to be supported on a step of a movable ground ring fit around a fixed ground ring. The consumable isolation ring is configured to electrically isolate the movable ground ring from a dielectric ring of the movable substrate support assembly.
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