发明申请
- 专利标题: SMART SELECTION AND/OR WEIGHTING OF PARAMETERS FOR LITHOGRAPHIC PROCESS SIMULATION
- 专利标题(中): 智能选择和/或加权参数用于光刻过程模拟
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申请号: US12615004申请日: 2009-11-09
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公开(公告)号: US20120005637A9公开(公告)日: 2012-01-05
- 发明人: Yu Cao , Wenjin Shao , Henying Feng , Fel Du , Martin Snajdr
- 申请人: Yu Cao , Wenjin Shao , Henying Feng , Fel Du , Martin Snajdr
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
The present invention generally relates to simulating a lithographic process, and more particularly to methods for smart selection and smart weighting when selecting parameters and/or kernels used in aerial image computation. According to one aspect, advantages in simulation throughput and/or accuracy can be achieved by selecting TCC kernels more intelligently, allowing highly accurate aerial images to be simulated using a relatively fewer number of TCC kernels than in the state of the art. In other words, the present invention allows for aerial images to be simulated with the same or better accuracy using much less simulation throughput than required in the prior art, all else being equal.
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