公开(公告)号：US20120005637A9

公开(公告)日：2012-01-05

申请号：US12615004

申请日：2009-11-09

申请人： Yu Cao ,  Wenjin Shao ,  Henying Feng ,  Fel Du ,  Martin Snajdr

发明人： Yu Cao ,  Wenjin Shao ,  Henying Feng ,  Fel Du ,  Martin Snajdr

IPC分类号： G06F17/50

CPC分类号： G03F7/705 ,  G03F7/70666

摘要： The present invention generally relates to simulating a lithographic process, and more particularly to methods for smart selection and smart weighting when selecting parameters and/or kernels used in aerial image computation. According to one aspect, advantages in simulation throughput and/or accuracy can be achieved by selecting TCC kernels more intelligently, allowing highly accurate aerial images to be simulated using a relatively fewer number of TCC kernels than in the state of the art. In other words, the present invention allows for aerial images to be simulated with the same or better accuracy using much less simulation throughput than required in the prior art, all else being equal.

摘要翻译： 本发明一般涉及光刻过程的模拟，更具体地说，涉及在选择在空间图像计算中使用的参数和/或内核时智能选择和智能加权的方法。 根据一个方面，可以通过更智能地选择TCC核来实现模拟吞吐量和/或精度的优点，从而能够使用比现有技术中相对较少数量的TCC内核来模拟高精度的空间图像。 换句话说，本发明允许使用比现有技术中所需要的模拟吞吐量低得多的相同或更好的精度来模拟航空图像，其他所有方面都相同。

公开(公告)号：US20110113390A1

公开(公告)日：2011-05-12

申请号：US12615004

申请日：2009-11-09

申请人： Yu CAO ,  Wenjin Shao ,  Henying Feng ,  Fel Du ,  Martin Snajdr

发明人： Yu CAO ,  Wenjin Shao ,  Henying Feng ,  Fel Du ,  Martin Snajdr

IPC分类号： G06F17/50

CPC分类号： G03F7/705 ,  G03F7/70666

摘要： The present invention generally relates to simulating a lithographic process, and more particularly to methods for smart selection and smart weighting when selecting parameters and/or kernels used in aerial image computation. According to one aspect, advantages in simulation throughput and/or accuracy can be achieved by selecting TCC kernels more intelligently, allowing highly accurate aerial images to be simulated using a relatively fewer number of TCC kernels than in the state of the art. In other words, the present invention allows for aerial images to be simulated with the same or better accuracy using much less simulation throughput than required in the prior art, all else being equal.

摘要翻译： 本发明一般涉及模拟光刻工艺，更具体地说，涉及在选择在空间图像计算中使用的参数和/或核心时智能选择和智能加权的方法。 根据一个方面，可以通过更智能地选择TCC核来实现模拟吞吐量和/或精度的优点，从而能够使用比现有技术中相对较少数量的TCC内核来模拟高精度的空间图像。 换句话说，本发明允许使用比现有技术中所需要的模拟吞吐量低得多的相同或更好的精度来模拟航空图像，其他所有方面都相同。

公开(公告)号：US10025198B2

公开(公告)日：2018-07-17

申请号：US12615004

申请日：2009-11-09

申请人： Yu Cao ,  Wenjin Shao ,  Hanying Feng ,  Fei Du ,  Martin Snajdr

发明人： Yu Cao ,  Wenjin Shao ,  Hanying Feng ,  Fei Du ,  Martin Snajdr

IPC分类号： G06F17/50 ,  G03F7/20

摘要： The present invention generally relates to simulating a lithographic process, and more particularly to methods for smart selection and smart weighting when selecting parameters and/or kernels used in aerial image computation. According to one aspect, advantages in simulation throughput and/or accuracy can be achieved by selecting TCC kernels more intelligently, allowing highly accurate aerial images to be simulated using a relatively fewer number of TCC kernels than in the state of the art. In other words, the present invention allows for aerial images to be simulated with the same or better accuracy using much less simulation throughput than required in the prior art, all else being equal.