发明申请
- 专利标题: PACKAGED MICROELECTRONIC IMAGERS AND METHODS OF PACKAGING MICROELECTRONIC IMAGERS
- 专利标题(中): 包装微电子图像和包装微电子图像的方法
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申请号: US13236907申请日: 2011-09-20
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公开(公告)号: US20120009717A1公开(公告)日: 2012-01-12
- 发明人: Kyle K. Kirby , Salman Akram , William M. Hiatt
- 申请人: Kyle K. Kirby , Salman Akram , William M. Hiatt
- 主分类号: H01L31/0224
- IPC分类号: H01L31/0224
摘要:
Microelectronic imagers, methods for packaging microelectronic imagers, and methods for forming electrically conductive through-wafer interconnects in microelectronic imagers are disclosed herein. In one embodiment, a microelectronic imaging die can include a microelectronic substrate, an integrated circuit, and an image sensor electrically coupled to the integrated circuit. A bond-pad is carried by the substrate and electrically coupled to the integrated circuit. An electrically conductive through-wafer interconnect extends partially through the substrate and is in contact with the bond-pad. The interconnect can include a passage extending partially through the substrate to the bond-pad, a dielectric liner deposited into the passage and in contact with the substrate, a conductive layer deposited onto at least a portion of the dielectric liner, a wetting agent deposited onto at least a portion of the conductive layer, and a conductive fill material deposited into the passage and electrically coupled to the bond-pad.
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