Invention Application
- Patent Title: Laser irradiation apparatus
- Patent Title (中): 激光照射装置
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Application No.: US13067617Application Date: 2011-06-15
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Publication No.: US20120012760A1Publication Date: 2012-01-19
- Inventor: Won-Kyu Lee , Seong-Hyun Jin , Jae-Hwan Oh , Young-Jin Chang , Jae-Beom Choi
- Applicant: Won-Kyu Lee , Seong-Hyun Jin , Jae-Hwan Oh , Young-Jin Chang , Jae-Beom Choi
- Priority: KR10-2010-0069153 20100716
- Main IPC: G21K5/10
- IPC: G21K5/10

Abstract:
A laser irradiation apparatus provides a laser beam along a scan direction to a semiconductor layer including a plurality of pixel areas. The laser irradiation apparatus includes at least one laser mask including a plurality of slit groups respectively facing portions of the plurality of pixel areas and a laser generator generating the laser beam that pass through the plurality of slit groups of the at least one laser mask.
Information query