Invention Application
US20120012760A1 Laser irradiation apparatus 审中-公开
激光照射装置

Laser irradiation apparatus
Abstract:
A laser irradiation apparatus provides a laser beam along a scan direction to a semiconductor layer including a plurality of pixel areas. The laser irradiation apparatus includes at least one laser mask including a plurality of slit groups respectively facing portions of the plurality of pixel areas and a laser generator generating the laser beam that pass through the plurality of slit groups of the at least one laser mask.
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