发明申请
- 专利标题: METAL GATE SEMICONDUCTOR DEVICE
- 专利标题(中): 金属栅极半导体器件
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申请号: US13245494申请日: 2011-09-26
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公开(公告)号: US20120012948A1公开(公告)日: 2012-01-19
- 发明人: Ching-Han Yeh , Chen-Pin Hsu , Ming-Yuan Wu , Kong-Beng Thei , Harry Chuang
- 申请人: Ching-Han Yeh , Chen-Pin Hsu , Ming-Yuan Wu , Kong-Beng Thei , Harry Chuang
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd. ("TSMC")
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd. ("TSMC")
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L29/78
- IPC分类号: H01L29/78
摘要:
A semiconductor device includes a semiconductor substrate, a source and a drain region formed on the semiconductor substrate, and a gate structure disposed on the substrate between the source and drain regions. The gate structure includes an interfacial layer formed over the substrate, a high-k dielectric formed over the interfacial layer, and a metal gate formed over the high-k dielectric that includes a first metal layer and a second metal layer, where the first metal layer is formed on a portion of the sidewalls of the gate structure and where the second metal layer is formed on another portion of the sidewalls of the gate structure.
公开/授权文献
- US08629515B2 Metal gate semiconductor device 公开/授权日:2014-01-14
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