发明申请
US20120013866A1 LITHOGRAPHIC APPARATUS, FLUID COMBINING UNIT AND DEVICE MANUFACTURING METHOD
有权
液晶显示装置，流体组合装置及装置制造方法
- 专利标题： LITHOGRAPHIC APPARATUS, FLUID COMBINING UNIT AND DEVICE MANUFACTURING METHOD
- 专利标题（中）： 液晶显示装置，流体组合装置及装置制造方法
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申请号： US13238941申请日： 2011-09-21
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公开(公告)号： US20120013866A1公开(公告)日： 2012-01-19
- 发明人: Johannes Catharinus Hubertus MULKENS , Matthew LIPSON , Harry SEWELL , Louis John MARKOYA
- 申请人： Johannes Catharinus Hubertus MULKENS , Matthew LIPSON , Harry SEWELL , Louis John MARKOYA
- 申请人地址： NL Veldhoven NL Veldhoven
- 专利权人： ASML HOLDING N.V.,ASML NETHERLANDS B.V.
- 当前专利权人： ASML HOLDING N.V.,ASML NETHERLANDS B.V.
- 当前专利权人地址： NL Veldhoven NL Veldhoven
- 主分类号： G03B27/52
- IPC分类号： G03B27/52
摘要：
A system for tuning the refractive index of immersion liquid in an immersion lithographic apparatus is disclosed. Two or more immersion liquids of different refractive index are mixed together in order to achieve a desired refractive index. Further, the fluids may be conditioned and treated to maintain optical characteristics.
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