发明申请
- 专利标题： COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP
- 专利标题（中）： 组合泵系统，包括一个泵和一个泵
-
申请号： US13202890申请日： 2010-03-09
-
公开(公告)号： US20120014814A1公开(公告)日： 2012-01-19
- 发明人: Antonio Bonucci , Andrea Conte , Paolo Manini
- 申请人： Antonio Bonucci , Andrea Conte , Paolo Manini
- 申请人地址： IT LAINATE (MI)
- 专利权人： SAES GETTERS S.P.A.
- 当前专利权人： SAES GETTERS S.P.A.
- 当前专利权人地址： IT LAINATE (MI)
- 优先权： ITMI2009A000402 20090317
- 国际申请： PCT/EP10/52975 WO 20100309
- 主分类号： H01J41/12
- IPC分类号： H01J41/12
摘要：
A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.
公开/授权文献
信息查询
