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    Process for the formation of miniaturized getter deposits and getter deposits so obtained
    1.
    发明授权
    Process for the formation of miniaturized getter deposits and getter deposits so obtained 有权
    形成小型吸气剂沉积物和吸附剂沉积物的方法

    公开(公告)号：US07998319B2

    公开(公告)日：2011-08-16

    申请号：US11911065

    申请日：2006-04-11

    申请人： Sara Guadagnuolo ,  Marco Moraja ,  Andrea Conte

    发明人： Sara Guadagnuolo ,  Marco Moraja ,  Andrea Conte

    IPC分类号： C23C14/34 ,  C23C14/14

    CPC分类号： H01L21/0272 ,  B81C1/00285 ,  Y10T428/2462

    摘要： A process is provided for the formation of miniaturized getter deposits, comprising the steps of forming a layer of a photosensitive polymeric material on a support; selectively exposing the polymeric layer in order to cause a chemical modification in a portion of the polymeric layer; removing with a first solvent only one of the previously exposed or the not previously exposed portions of the polymeric layer, thus forming cavities in the polymeric layer; forming a thin layer of a getter material by cathodic deposition at the bottom of the cavity and on the residual polymer; and removing with a second solvent the polymer portion not removed by the first solvent, leaving at least a getter material deposit on the support surface.

    摘要翻译： 提供了用于形成小型化的吸气剂沉积物的方法，包括以下步骤：在支撑体上形成感光聚合物材料层; 选择性地暴露聚合物层以便在聚合物层的一部分中引起化学改性; 用第一溶剂除去聚合物层中先前暴露或未预先暴露的部分之一，从而在聚合物层中形成空腔; 通过阴极沉积在空腔的底部和残留聚合物上形成吸气剂材料的薄层; 并且用第二溶剂除去聚合物部分未被第一溶剂除去，留下至少吸气剂材料沉积在载体表面上。

    Multilayer getter structures and methods for making same
    2.
    发明申请
    Multilayer getter structures and methods for making same 审中-公开
    多层吸气剂结构及其制作方法

    公开(公告)号：US20070037007A1

    公开(公告)日：2007-02-15

    申请号：US11497802

    申请日：2006-08-01

    申请人： Andrea Conte ,  Marco Moraja

    发明人： Andrea Conte ,  Marco Moraja

    IPC分类号： B32B15/00 ,  C25D5/10 ,  C25D5/28

    CPC分类号： B32B15/01 ,  H01J7/183 ,  Y10T428/12479 ,  Y10T428/12493 ,  Y10T428/12611 ,  Y10T428/12806 ,  Y10T428/12812 ,  Y10T428/12819 ,  Y10T428/12875 ,  Y10T428/12986 ,  Y10T428/12993

    摘要： Getter multilayer structures are disclosed, embodiments of which include at least a layer of a non-evaporable getter alloy having a low activation temperature over a layer of a different non-evaporable getter material having high specific surface area, both preferably obtained by cathodic deposition. The multilayer NEG structures exhibit better gas sorbing characteristics and lower activation temperature lower than those of deposits made up of a single material. A process for manufacturing such structures includes depositing a first, high surface area NEG film on a support, and then depositing a thin over layer of low activation NEG film.

    摘要翻译： 吸收剂多层结构被公开，其实施方案包括至少一层不可蒸发的吸气剂合金，其具有比具有高比表面积的不同不可蒸发的吸气剂材料的层的低活化温度，两者优选通过阴极沉积获得。 多层NEG结构表现出比单一材料构成的沉积物更好的气体吸附特性和较低的活化温度。 制造这种结构的方法包括在载体上沉积第一高表面积NEG膜，然后沉积薄的低活化NEG膜的上层。

    Process for producing high-porosity non-evaporable getter materials
    9.
    发明授权
    Process for producing high-porosity non-evaporable getter materials 失效
    生产高孔隙度非蒸发性吸气材料的方法

    公开(公告)号：US6110807A

    公开(公告)日：2000-08-29

    申请号：US87401

    申请日：1998-05-29

    申请人： Andrea Conte ,  Sergio Carella

    发明人： Andrea Conte ,  Sergio Carella

    IPC分类号： B22F3/11 ,  C01B3/50 ,  C01B13/02 ,  C22C1/04 ,  H01L21/322

    CPC分类号： C22C1/0458 ,  B22F3/1121 ,  C01B13/0281 ,  C01B3/508 ,  B22F2998/00

    摘要： A process is disclosed for producing non-evaporable getter materials having high porosity and improved gas sorption rates. The process includes mixing together a metallic getter element, a getter alloy and a solid organic compound, all three components being in the form of powders having specific particle sizes. The mixture is subjected to a compression of less than about 1000 kg/cm.sup.2 and is sintered at a temperature between about 900.degree. C. and about 1200.degree. C. for a period between about 5 minutes and about 60 minutes. The getter material thus obtained is used to produce getter bodies shaped as pellets, sheets or discs having better mechanical strength than similar bodies of other getter material having comparable porosity.

    摘要翻译： 公开了用于生产具有高孔隙率和改善的气体吸附速率的非蒸发性吸气剂材料的方法。 该方法包括将金属吸气剂元件，吸气剂合金和固体有机化合物混合在一起，所有三种组分都是具有特定粒径的粉末形式。 将混合物经受小于约1000kg / cm 2的压缩，并在约900℃至约1200℃的温度下烧结约5分钟至约60分钟。 由此获得的吸气剂材料用于生产具有比具有可比较的孔隙率的其它吸气材料的类似物体更好的机械强度的颗粒，片或盘形状的吸气体。

    Method for pumping a chamber using an in situ getter pump
    10.
    发明授权
    Method for pumping a chamber using an in situ getter pump 失效
    使用原位吸气泵泵送室的方法

    公开(公告)号：US5997255A

    公开(公告)日：1999-12-07

    申请号：US787993

    申请日：1997-01-23

    申请人： Gordon P. Krueger ,  D'Arcy H. Lorimer ,  Sergio Carella ,  Andrea Conte

    发明人： Gordon P. Krueger ,  D'Arcy H. Lorimer ,  Sergio Carella ,  Andrea Conte

    IPC分类号： C23C14/54 ,  C23C14/56 ,  F04B37/02 ,  F04B37/08 ,  F04B37/14 ,  F04B37/16 ,  H01J9/38 ,  H01L21/00 ,  H01L21/02 ,  H01L21/20 ,  F04F11/00

    CPC分类号： C23C14/54 ,  C23C14/56 ,  C23C14/564 ,  F04B37/02 ,  F04B37/08

    摘要： A getter pump module includes a number of getter disks provided with axial holes, and a heating element which extends through the holes to support and heat the getter disks. The getter disks are preferably solid, porous, sintered getter disks that are provided with a titanium hub that engages the heating element. A thermally isolating shield is provided to shield the getter disks from heat sources and heat sinks within the chamber, and to aid in the rapid regeneration of the getter disks. In certain embodiments of the present invention the heat shields are fixed, and in other embodiments the heat shield is movable. In one embodiment, a focus shield is provided to reflect thermal energy to the getter material from an external heater element and provide high pumping speeds. An embodiment of the present invention also provides for a rotating getter element to enhance getter material utilization.

    摘要翻译： 吸气泵模块包括设置有轴向孔的多个吸气盘，以及延伸穿过孔以加热吸气盘的加热元件。 吸气盘优选是固体，多孔，烧结的吸气剂盘，其具有与加热元件接合的钛毂。 提供了一种隔热屏蔽件，用于屏蔽吸气剂盘从室内的热源和散热器，并帮助吸气剂盘的快速再生。 在本发明的某些实施例中，隔热罩是固定的，并且在其它实施例中，隔热罩是可移动的。 在一个实施例中，提供聚焦屏蔽以将来自外部加热器元件的吸热材料的热能反射并提供高的泵送速度。 本发明的一个实施方案还提供了一种旋转吸气剂元件以增强吸气剂材料的利用。