发明申请
- 专利标题： Semiconductor Processing Dispatch Control
- 专利标题（中）： 半导体处理调度控制
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申请号： US12839014申请日： 2010-07-19
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公开(公告)号： US20120016509A1公开(公告)日： 2012-01-19
- 发明人: Sunny Wu , Yen-Di Tsen , Chun-Hsien Lin , Keung Hui , Jo Fei Wang , Jong-I Mou
- 申请人： Sunny Wu , Yen-Di Tsen , Chun-Hsien Lin , Keung Hui , Jo Fei Wang , Jong-I Mou
- 申请人地址： TW Hsin-Chu
- 专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址： TW Hsin-Chu
- 主分类号： G06F19/00
- IPC分类号： G06F19/00
摘要：
An embodiment is a method for semiconductor processing control. The method comprises identifying a key process stage from a plurality of process stages based on a parameter of processed wafers, forecasting a trend for a wafer processed by the key process stage and some of the plurality of process stages based on the parameter, and dispatching the wafer to one of a first plurality of tools in a tuning process stage. The one of the first plurality of tools is determined based on the trend.
公开/授权文献
- US08295965B2 Semiconductor processing dispatch control 公开/授权日：2012-10-23
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