发明申请
US20120017833A1 CONVEYOR DEVICE AND SUBSTRATE TREATMENT INSTALLATION 审中-公开
输送装置和基板处理装置

CONVEYOR DEVICE AND SUBSTRATE TREATMENT INSTALLATION
摘要:
Conveyor devices, in particular for use in substrate treatment devices, and configurations of substrate treatment devices, in particular horizontal coating installations for the mass coating of plate-like substrates during the production of solar cells are provided. The conveyor device comprises a multiplicity of conveyor rollers, each mounted rotatably at both ends thereof. During operation of the conveyor device, at least one conveyor roller is displaceable axially, i.e. parallel to the axis of rotation thereof.
信息查询
0/0