发明申请
- 专利标题: CONVEYOR DEVICE AND SUBSTRATE TREATMENT INSTALLATION
- 专利标题(中): 输送装置和基板处理装置
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申请号: US13130879申请日: 2011-01-14
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公开(公告)号: US20120017833A1公开(公告)日: 2012-01-26
- 发明人: Hubertus Von Der Waydbrink , Michael Hentschel , Marco Kenne , Steffen Lessmann , Thomas Peunsch , Reinhard Jaeger
- 申请人: Hubertus Von Der Waydbrink , Michael Hentschel , Marco Kenne , Steffen Lessmann , Thomas Peunsch , Reinhard Jaeger
- 申请人地址: DE Dresden
- 专利权人: VON ARDENNE ANLAGENTECHNIK GMBH
- 当前专利权人: VON ARDENNE ANLAGENTECHNIK GMBH
- 当前专利权人地址: DE Dresden
- 优先权: DE102010006750.4 20100202; DE102010029653.8 20100602
- 国际申请: PCT/EP2011/050436 WO 20110114
- 主分类号: B65G13/02
- IPC分类号: B65G13/02 ; C23C16/00
摘要:
Conveyor devices, in particular for use in substrate treatment devices, and configurations of substrate treatment devices, in particular horizontal coating installations for the mass coating of plate-like substrates during the production of solar cells are provided. The conveyor device comprises a multiplicity of conveyor rollers, each mounted rotatably at both ends thereof. During operation of the conveyor device, at least one conveyor roller is displaceable axially, i.e. parallel to the axis of rotation thereof.
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