Invention Application
US20120018797A1 NONVOLATILE MEMORY DEVICE, AND METHODS OF MANUFACTURING AND DRIVING THE SAME
审中-公开
非易失性存储器件及其制造和驱动方法
- Patent Title: NONVOLATILE MEMORY DEVICE, AND METHODS OF MANUFACTURING AND DRIVING THE SAME
- Patent Title (中): 非易失性存储器件及其制造和驱动方法
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Application No.: US13168257Application Date: 2011-06-24
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Publication No.: US20120018797A1Publication Date: 2012-01-26
- Inventor: Tea-Kwang YU , Yong-Tae KIM , Byung-Sup SHIM , Yong-Kyu LEE , Bo-Young SEO , Ji-Hoon PARK
- Applicant: Tea-Kwang YU , Yong-Tae KIM , Byung-Sup SHIM , Yong-Kyu LEE , Bo-Young SEO , Ji-Hoon PARK
- Priority: KR10-2010-0071059 20100722
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
A nonvolatile memory device includes a device isolation film defining an active region in a semiconductor substrate, a pocket well region formed in an upper portion of the active region and having a first conductivity type, a gate electrode formed on the active region and extending to intersect the active region, a tunnel insulating film, a charge storage film, and a blocking insulating film sequentially disposed between the active region and the gate electrode, a source region and a drain region respectively formed in a first region and a second region of the active region exposed on both sides of the gate electrode, and each having a second conductivity type opposite to the first conductivity type, a pocket well junction region formed in the first region adjacent to the source region and contacting the pocket well region, and having the first conductivity type, and a metal silicide layer formed in the first region and contacting the source region and the pocket well junction region.
Information query
IPC分类: