发明申请
US20120021561A1 PLASMA PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SOLAR CELL USING SAME
审中-公开
等离子体处理装置和使用该方法制造太阳能电池的方法
- 专利标题： PLASMA PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SOLAR CELL USING SAME
- 专利标题（中）： 等离子体处理装置和使用该方法制造太阳能电池的方法
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申请号： US13260601申请日： 2010-03-24
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公开(公告)号： US20120021561A1公开(公告)日： 2012-01-26
- 发明人: Akira Terakawa
- 申请人： Akira Terakawa
- 申请人地址： JP Moriguchi-shi, Osaka
- 专利权人： Sanyo Electric Co. Ltd.
- 当前专利权人： Sanyo Electric Co. Ltd.
- 当前专利权人地址： JP Moriguchi-shi, Osaka
- 优先权： JP2009-084788 20090331
- 国际申请： PCT/JP2010/055022 WO 20100324
- 主分类号： H01L31/18
- IPC分类号： H01L31/18 ; C23C16/448
摘要：
A method of manufacturing a solar cell in which qualities and thicknesses of formed films are uniformed is obtained. This method of manufacturing a solar cell includes steps of forming a substrate-side electrode (11) on a substrate (10), forming at least part of a photoelectric conversion unit (12, 13) on the substrate-side electrode by supplying source gas from projecting portions of a plasma processing apparatus (1) including a first electrode (4) having the projecting portions (4b, 24a, 24b, 24c, 24d), made of a conductive porous material, provided to cover gas supply ports (4a), and forming a rear-side electrode (14) on the photoelectric conversion unit.