Invention Application
US20120024389A1 INTEGRATED ELECTROMAGNETIC ACTUATOR, IN PARTICULAR ELECTROMAGNETIC MICRO-PUMP FOR A MICROFLUIDIC DEVICE BASED ON MEMS TECHNOLOGY, AND MANUFACTURING PROCESS
审中-公开
基于MEMS技术的微流控器件的特殊电磁致动器，特别是电磁微型泵，以及制造工艺
- Patent Title: INTEGRATED ELECTROMAGNETIC ACTUATOR, IN PARTICULAR ELECTROMAGNETIC MICRO-PUMP FOR A MICROFLUIDIC DEVICE BASED ON MEMS TECHNOLOGY, AND MANUFACTURING PROCESS
- Patent Title (中): 基于MEMS技术的微流控器件的特殊电磁致动器，特别是电磁微型泵，以及制造工艺
-
Application No.: US13194583Application Date: 2011-07-29
-
Publication No.: US20120024389A1Publication Date: 2012-02-02
- Inventor: Lucio Renna , Clelia Galati , Natalia Maria Rita Spinella , Piero Giorgio Fallica
- Applicant: Lucio Renna , Clelia Galati , Natalia Maria Rita Spinella , Piero Giorgio Fallica
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Priority: ITTO2010A000664 20100730
- Main IPC: F15D1/00
- IPC: F15D1/00 ; H01F7/06 ; B01L3/00 ; H01F41/06
Abstract:
An integrated electromagnetic actuator comprising: a first structural layer; a flexible membrane, extending over the first structural layer and comprising regions of ferromagnetic material; a chamber, delimited between the first structural layer and the flexible membrane; a winding, comprising a plurality of turns of conductive material and extending within the first structural layer; and a core element made of ferromagnetic material, extending within the first structural layer, inside the winding.
Information query
