发明申请
- 专利标题: SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD OF MANUFACTURING THE SAME
- 专利标题(中): 半导体发光器件及其制造方法
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申请号: US13167396申请日: 2011-06-23
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公开(公告)号: US20120025246A1公开(公告)日: 2012-02-02
- 发明人: Tae Hun KIM , Gi Bum KIM , Won Goo HUR , Young Sun KIM , Ki Sung KIM
- 申请人: Tae Hun KIM , Gi Bum KIM , Won Goo HUR , Young Sun KIM , Ki Sung KIM
- 优先权: KR10-2010-0063790 20100702
- 主分类号: H01L33/58
- IPC分类号: H01L33/58 ; B82Y40/00
摘要:
Disclosed are a semiconductor light emitting device and a method of manufacturing the same. The method includes providing a substrate having first and second main surfaces opposing each other and forming a first uneven structure in the first main surface, forming a sacrificial layer on the first main surface of the substrate, forming a mask having open regions on the sacrificial layer so as to expose a portion of an upper surface of the sacrificial layer, forming a second uneven structure in the substrate by etching the sacrificial layer and the substrate through the open regions, removing the sacrificial layer and the mask from the substrate, and forming a light emitting stack on the first and second uneven structures of the substrate.
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