发明申请
- 专利标题： METHOD AND SYSTEM FOR THERMAL IMPRINT LITHOGRAPHY
- 专利标题（中）： 热印刷法的方法与系统
-
申请号： US12847964申请日： 2010-07-30
-
公开(公告)号： US20120025426A1公开(公告)日： 2012-02-02
- 发明人: David Kuo , Justin Hwu , Gennady Gauzner , Kim Yang Lee , Dieter Weller
- 申请人： David Kuo , Justin Hwu , Gennady Gauzner , Kim Yang Lee , Dieter Weller
- 申请人地址： US CA Scotts Valley
- 专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人： SEAGATE TECHNOLOGY LLC
- 当前专利权人地址： US CA Scotts Valley
- 主分类号： B29C59/02
- IPC分类号： B29C59/02
摘要：
A method and apparatus of thermal imprint lithography includes moving an imprinter against a surface to be imprinted, supplying energy to a layer of heating material, and forming features in the surface to be imprinted. The imprinter comprises a main body and the layer of heating material under the main body. In an embodiment the layer of heating material is electrically heated. In alternate embodiments, the layer of heating material is optically heated.