发明申请
US20120034563A1 RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN 有权
耐蚀组合物及其制造方法

  • 专利标题: RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
  • 专利标题(中): 耐蚀组合物及其制造方法
  • 申请号: US13196446
    申请日: 2011-08-02
  • 公开(公告)号: US20120034563A1
    公开(公告)日: 2012-02-09
  • 发明人: Koji ICHIKAWASatoshi Yamamoto
  • 申请人: Koji ICHIKAWASatoshi Yamamoto
  • 优先权: JPJP2010-174198 20100803
  • 主分类号: G03F7/38
  • IPC分类号: G03F7/38 G03F7/039
RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
摘要:
A resist composition contains; a resin having a structural unit derived from a compound represented by the formula (a); and an acid generator represented by the formula (B1). wherein R1 represents a hydrogen atom or a methyl group; A10 represents a single bond, an optionally substituted C1 to C6 alkanediyl group or the like; W1 represents an optionally substituted C4 to C36 alicyclic hydrocarbon group; A20 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; R2 in each occurrence independently represents a C1 to C12 perfluoroalkyl group; n represents 1 or 2; Q1 and Q2 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; Lb1 represents an optionally substituted C1 to C17 divalent aliphatic hydrocarbon group; Y represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; and Z+ represents an organic cation.
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