发明申请
- 专利标题: MANUFACTURING METHOD FOR A THIN FILM TRANSISTOR-LIQUID CRYSTAL DISPLAY
- 专利标题(中): 薄膜晶体管液晶显示器的制造方法
-
申请号: US13273460申请日: 2011-10-14
-
公开(公告)号: US20120034722A1公开(公告)日: 2012-02-09
- 发明人: Haijun Qiu , Zhangtao Wang , Xu Chen , Tae Yup Min
- 申请人: Haijun Qiu , Zhangtao Wang , Xu Chen , Tae Yup Min
- 优先权: CNCN200610103865.6 20060804; CNCN200610103866.0 20060804
- 主分类号: H01L33/16
- IPC分类号: H01L33/16 ; H01L21/336
摘要:
A pixel unit of TFT-LCD array substrate and a manufacturing method thereof is disclosed. In the manufacturing method, besides a first insulating layer and a passivation layer, a second insulating layer is adopted to cover the gate island, and forms an opening on the gate island to expose the channel region, the source region and the drain region of the TFT. A gray tone mask and a photoresist lifting-off process are utilized to perform patterning, so that the TFT-LCD array substrate can be achieved with just three masks.
公开/授权文献
信息查询
IPC分类: