公开(公告)号：US20080030639A1

公开(公告)日：2008-02-07

申请号：US11834118

申请日：2007-08-06

申请人： Haijun Qiu ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

发明人： Haijun Qiu ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

IPC分类号： G02F1/136 ,  H01L21/77

CPC分类号： H01L27/1288 ,  G02F1/1368 ,  G02F2001/136231 ,  H01L27/1214

摘要： A pixel unit of TFT-LCD array substrate and a manufacturing method thereof is disclosed. In the manufacturing method, besides a first insulating layer and a passivation layer, a second insulating layer is adopted to cover the gate island, and forms an opening on the gate island to expose the channel region, the source region and the drain region of the TFT. A gray tone mask and a photoresist lifting-off process are utilized to perform patterning, so that the TFT-LCD array substrate can be achieved with just three masks.

摘要翻译： 公开了一种TFT-LCD阵列基板的像素单元及其制造方法。 在该制造方法中，除了第一绝缘层和钝化层之外，还采用第二绝缘层覆盖栅极岛，并且在栅极岛上形成开口，以露出沟道区，源极区和漏极区 TFT。 利用灰度色调掩模和光致抗蚀剂剥离工艺进行图案化，从而可以用三个掩模实现TFT-LCD阵列基板。

公开(公告)号：US20120034722A1

公开(公告)日：2012-02-09

申请号：US13273460

申请日：2011-10-14

申请人： Haijun Qiu ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

发明人： Haijun Qiu ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

IPC分类号： H01L33/16 ,  H01L21/336

CPC分类号： H01L27/1288 ,  G02F1/1368 ,  G02F2001/136231 ,  H01L27/1214

摘要： A pixel unit of TFT-LCD array substrate and a manufacturing method thereof is disclosed. In the manufacturing method, besides a first insulating layer and a passivation layer, a second insulating layer is adopted to cover the gate island, and forms an opening on the gate island to expose the channel region, the source region and the drain region of the TFT. A gray tone mask and a photoresist lifting-off process are utilized to perform patterning, so that the TFT-LCD array substrate can be achieved with just three masks.

摘要翻译： 公开了一种TFT-LCD阵列基板的像素单元及其制造方法。 在该制造方法中，除了第一绝缘层和钝化层之外，还采用第二绝缘层覆盖栅极岛，并且在栅极岛上形成开口，以露出沟道区域，源极区域和漏极区域 TFT。 利用灰度色调掩模和光致抗蚀剂剥离工艺进行图案化，从而可以用三个掩模实现TFT-LCD阵列基板。

公开(公告)号：US20080142802A1

公开(公告)日：2008-06-19

申请号：US11952252

申请日：2007-12-07

申请人： Haijun Qiu ,  Zhangtao Wang ,  Tae Yup Min ,  Xu Chen

发明人： Haijun Qiu ,  Zhangtao Wang ,  Tae Yup Min ,  Xu Chen

IPC分类号： H01L29/04 ,  H01L21/336

CPC分类号： H01L27/124 ,  H01L27/1214 ,  H01L27/1288

摘要： A thin film transistor liquid crystal display (TFT-LCD) pixel unit and a method for manufacturing the same. The pixel unit comprises a gate line and a gate electrode formed on a substrate and a first gate insulating layer, an active layer, and a doped layer that are sequentially formed on the gate line and the gate electrode. An intercepting trench is formed on the gate line to cut off the doped layer and the active layer on the gate line. A second insulating layer covers the intercepting trench and the substrate where the gate line and the gate electrode are not formed. A pixel electrode is formed on the second insulating layer and a part of the pixel electrode overlaps one of a source and drain electrodes.

摘要翻译： 薄膜晶体管液晶显示器（TFT-LCD）像素单元及其制造方法。 像素单元包括形成在基板上的栅极线和栅电极以及依次形成在栅极线和栅电极上的第一栅极绝缘层，有源层和掺杂层。 在栅极线上形成截止沟槽以切断栅极线上的掺杂层和有源层。 第二绝缘层覆盖不形成栅极线和栅电极的截止沟槽和衬底。 像素电极形成在第二绝缘层上，并且像素电极的一部分与源极和漏极之一重叠。

公开(公告)号：US08294153B2

公开(公告)日：2012-10-23

申请号：US13102164

申请日：2011-05-06

申请人： Haijun Qiu ,  Zhangtao Wang ,  Tae Yup Min ,  Xu Chen

发明人： Haijun Qiu ,  Zhangtao Wang ,  Tae Yup Min ,  Xu Chen

IPC分类号： H01L33/62

CPC分类号： H01L27/124 ,  H01L27/1214 ,  H01L27/1288

摘要： A thin film transistor liquid crystal display (TFT-LCD) pixel unit and a method for manufacturing the same. The pixel unit comprises a gate line and a gate electrode formed on a substrate and a first gate insulating layer, an active layer, and a doped layer that are sequentially formed on the gate line and the gate electrode. An intercepting trench is formed on the gate line to cut off the doped layer and the active layer on the gate line. A second insulating layer covers the intercepting trench and the substrate where the gate line and the gate electrode are not formed. A pixel electrode is formed on the second insulating layer and a part of the pixel electrode overlaps one of a source and drain electrodes.

摘要翻译： 薄膜晶体管液晶显示器（TFT-LCD）像素单元及其制造方法。 像素单元包括形成在基板上的栅极线和栅电极以及依次形成在栅极线和栅电极上的第一栅极绝缘层，有源层和掺杂层。 在栅极线上形成截止沟槽以切断栅极线上的掺杂层和有源层。 第二绝缘层覆盖不形成栅极线和栅电极的截止沟槽和衬底。 像素电极形成在第二绝缘层上，并且像素电极的一部分与源极和漏极之一重叠。

公开(公告)号：US20110171767A1

公开(公告)日：2011-07-14

申请号：US13069767

申请日：2011-03-23

申请人： Haijun QIU ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

发明人： Haijun QIU ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

IPC分类号： H01L33/36

CPC分类号： H01L27/1288 ,  G02F1/1368 ,  G02F2001/136231 ,  H01L27/1214

摘要： A pixel unit of TFT-LCD array substrate and a manufacturing method thereof is disclosed. In the manufacturing method, besides a first insulating layer and a passivation layer, a second insulating layer is adopted to cover the gate island, and forms an opening on the gate island to expose the channel region, the source region and the drain region of the TFT. A gray tone mask and a photoresist lifting-off process are utilized to perform patterning, so that the TFT-LCD array substrate can be achieved with just three masks.

摘要翻译： 公开了一种TFT-LCD阵列基板的像素单元及其制造方法。 在该制造方法中，除了第一绝缘层和钝化层之外，还采用第二绝缘层覆盖栅极岛，并且在栅极岛上形成开口，以露出沟道区域，源极区域和漏极区域 TFT。 利用灰度色调掩模和光致抗蚀剂剥离工艺进行图案化，从而可以用三个掩模实现TFT-LCD阵列基板。

公开(公告)号：US07955911B2

公开(公告)日：2011-06-07

申请号：US11952252

申请日：2007-12-07

申请人： Haijun Qiu ,  Zhangtao Wang ,  Tae Yup Min ,  Xu Chen

发明人： Haijun Qiu ,  Zhangtao Wang ,  Tae Yup Min ,  Xu Chen

IPC分类号： H01L21/00 ,  H01L21/84

CPC分类号： H01L27/124 ,  H01L27/1214 ,  H01L27/1288

摘要： A thin film transistor liquid crystal display (TFT-LCD) pixel unit and a method for manufacturing the same. The pixel unit comprises a gate line and a gate electrode formed on a substrate and a first gate insulating layer, an active layer, and a doped layer that are sequentially formed on the gate line and the gate electrode. An intercepting trench is formed on the gate line to cut off the doped layer and the active layer on the gate line. A second insulating layer covers the intercepting trench and the substrate where the gate line and the gate electrode are not formed. A pixel electrode is formed on the second insulating layer and a part of the pixel electrode overlaps one of a source and drain electrodes.

摘要翻译： 薄膜晶体管液晶显示器（TFT-LCD）像素单元及其制造方法。 像素单元包括形成在基板上的栅极线和栅电极以及依次形成在栅极线和栅电极上的第一栅极绝缘层，有源层和掺杂层。 在栅极线上形成截止沟槽以切断栅极线上的掺杂层和有源层。 第二绝缘层覆盖不形成栅极线和栅电极的截止沟槽和衬底。 像素电极形成在第二绝缘层上，并且像素电极的一部分与源极和漏极之一重叠。

公开(公告)号：US08289463B2

公开(公告)日：2012-10-16

申请号：US13273460

申请日：2011-10-14

申请人： Haijun Qiu ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

发明人： Haijun Qiu ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

IPC分类号： G02F1/136 ,  G02F1/1343 ,  G02F1/13

CPC分类号： H01L27/1288 ,  G02F1/1368 ,  G02F2001/136231 ,  H01L27/1214

摘要： A pixel unit of TFT-LCD array substrate and a manufacturing method thereof is disclosed. In the manufacturing method, besides a first insulating layer and a passivation layer, a second insulating layer is adopted to cover the gate island, and forms an opening on the gate island to expose the channel region, the source region and the drain region of the TFT. A gray tone mask and a photoresist lifting-off process are utilized to perform patterning, so that the TFT-LCD array substrate can be achieved with just three masks.

摘要翻译： 公开了一种TFT-LCD阵列基板的像素单元及其制造方法。 在该制造方法中，除了第一绝缘层和钝化层之外，还采用第二绝缘层覆盖栅极岛，并且在栅极岛上形成开口，以露出沟道区域，源极区域和漏极区域 TFT。 利用灰度色调掩模和光致抗蚀剂剥离工艺进行图案化，从而可以用三个掩模实现TFT-LCD阵列基板。

公开(公告)号：US08040452B2

公开(公告)日：2011-10-18

申请号：US13069767

申请日：2011-03-23

申请人： Haijun Qiu ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

发明人： Haijun Qiu ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

IPC分类号： G02F1/136 ,  G02F1/1343 ,  G02F1/13

CPC分类号： H01L27/1288 ,  G02F1/1368 ,  G02F2001/136231 ,  H01L27/1214

摘要： A pixel unit of TFT-LCD array substrate and a manufacturing method thereof is disclosed. In the manufacturing method, besides a first insulating layer and a passivation layer, a second insulating layer is adopted to cover the gate island, and forms an opening on the gate island to expose the channel region, the source region and the drain region of the TFT. A gray tone mask and a photoresist lifting-off process are utilized to perform patterning, so that the TFT-LCD array substrate can be achieved with just three masks.

摘要翻译： 公开了一种TFT-LCD阵列基板的像素单元及其制造方法。 在该制造方法中，除了第一绝缘层和钝化层之外，还采用第二绝缘层覆盖栅极岛，并且在栅极岛上形成开口，以露出沟道区域，源极区域和漏极区域 TFT。 利用灰度色调掩模和光致抗蚀剂剥离工艺进行图案化，从而可以用三个掩模实现TFT-LCD阵列基板。

公开(公告)号：US07916230B2

公开(公告)日：2011-03-29

申请号：US11834118

申请日：2007-08-06

申请人： Haijun Qiu ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

发明人： Haijun Qiu ,  Zhangtao Wang ,  Xu Chen ,  Tae Yup Min

IPC分类号： G02F1/136 ,  G02F1/1343 ,  H01L29/786

CPC分类号： H01L27/1288 ,  G02F1/1368 ,  G02F2001/136231 ,  H01L27/1214

摘要： A pixel unit of TFT-LCD array substrate and a manufacturing method thereof is disclosed. In the manufacturing method, besides a first insulating layer and a passivation layer, a second insulating layer is adopted to cover the gate island, and forms an opening on the gate island to expose the channel region, the source region and the drain region of the TFT. A gray tone mask and a photoresist lifting-off process are utilized to perform patterning, so that the TFT-LCD array substrate can be achieved with just three masks.

摘要翻译： 公开了一种TFT-LCD阵列基板的像素单元及其制造方法。 在该制造方法中，除了第一绝缘层和钝化层之外，还采用第二绝缘层覆盖栅极岛，并且在栅极岛上形成开口，以露出沟道区域，源极区域和漏极区域 TFT。 利用灰度色调掩模和光致抗蚀剂剥离工艺进行图案化，从而可以用三个掩模实现TFT-LCD阵列基板。

公开(公告)号：US20130056739A1

公开(公告)日：2013-03-07

申请号：US13664852

申请日：2012-10-31

申请人： Zhangtao Wang ,  Haijun Qiu ,  Tae Yup Min ,  Seung Moo Rim

发明人： Zhangtao Wang ,  Haijun Qiu ,  Tae Yup Min ,  Seung Moo Rim

IPC分类号： H01L29/786

CPC分类号： H01L29/66765 ,  H01L27/1214 ,  H01L27/1248 ,  H01L27/1288

摘要： A TFT array substrate and a manufacturing method thereof, where the TFT array substrate includes a substrate; a gate line and a gate electrode integrated therewith, which are covered by a gate insulating layer, a semiconductor layer, and a ohmic contact layer sequentially. An insulating layer is formed on the resulting substrate and on both sides of the gate line and the gate electrode, the gate insulating layer, the semiconductor layer, and the ohmic contact layer. A trench is then formed in the ohmic contact layer to divide the ohmic contact layer over the semiconductor layer. A data line and first and second source/drain electrodes are then formed on the insulating layer and the ohmic contact layer.

摘要翻译： TFT阵列基板及其制造方法，其中，TFT阵列基板包括基板; 栅极线和栅极电极，其被栅极绝缘层，半导体层和欧姆接触层依次覆盖。 在所得到的衬底上以及栅极线和栅电极，栅极绝缘层，半导体层和欧姆接触层的两侧上形成绝缘层。 然后在欧姆接触层中形成沟槽，以将半导体层上的欧姆接触层分开。 然后在绝缘层和欧姆接触层上形成数据线和第一和第二源极/漏极。