发明申请
US20120037018A1 PATTERN TRANSFER DEVICE AND PATTERN TRANSFER METHOD 审中-公开
图案传输设备和图案传输方法

PATTERN TRANSFER DEVICE AND PATTERN TRANSFER METHOD
摘要:
Exemplary embodiments of the present invention disclose a pattern transfer device and a pattern transfer method. The pattern transfer device may include a printing plate stage to load a printing plate having a pattern of a predetermined shape, and a substrate stage to load a substrate on which the pattern formed on the printing plate is to be printed. The pattern transfer device also includes a pressure unit configured with the printing plate stage to apply pressure to the printing plate, and a printing unit to transfer the pattern formed on the printing plate to the substrate.
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