发明申请
- 专利标题： MULTI-AXIS LENS, BEAM SYSTEM MAKING USE OF THE COMPOUND LENS, AND METHOD OF MANUFACTURING THE COMPOUND LENS
- 专利标题（中）： 多轴透镜，使用该化合物镜头的光束系统及其制造方法
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申请号： US12856152申请日： 2010-08-13
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公开(公告)号： US20120037813A1公开(公告)日： 2012-02-16
- 发明人: Stefan LANIO
- 申请人： Stefan LANIO
- 申请人地址： DE Heimstetten
- 专利权人： ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBH
- 当前专利权人： ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBH
- 当前专利权人地址： DE Heimstetten
- 优先权： EP10172528.1 20100811
- 主分类号： H01J3/22
- IPC分类号： H01J3/22
摘要：
A lens system for a plurality of charged particle beams comprises a lens body with a first pole piece, a second pole piece and a plurality of lens openings for the respective charged particle beams; a common excitation coil arranged around the plurality of lens openings for providing a respective first magnetic flux to the lens openings; and a compensation coil arranged between the lens openings for providing a respective second magnetic flux to at least some of the lens openings so as to compensate for an asymmetry of the first magnetic flux.
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