发明申请
- 专利标题: SEAL RING STRUCTURE WITH METAL PAD
- 专利标题(中): 密封圈结构与金属垫
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申请号: US12916789申请日: 2010-11-01
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公开(公告)号: US20120038020A1公开(公告)日: 2012-02-16
- 发明人: Jeng-Shyan Lin , Dun-Nian Yaung , Jen-Cheng Liu , Hsin-Hui Lee , Wen-De Wang , Shu-Ting Tsai
- 申请人: Jeng-Shyan Lin , Dun-Nian Yaung , Jen-Cheng Liu , Hsin-Hui Lee , Wen-De Wang , Shu-Ting Tsai
- 申请人地址: TW Hsin-Chu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L23/528
- IPC分类号: H01L23/528 ; H01L21/768
摘要:
A method includes providing a substrate having a seal ring region and a circuit region, forming a seal ring structure over the seal ring region, forming a first frontside passivation layer above the seal ring structure, etching a frontside aperture in the first frontside passivation layer adjacent to an exterior portion of the seal ring structure, forming a frontside metal pad in the frontside aperture to couple the frontside metal pad to the exterior portion of the seal ring structure, forming a first backside passivation layer below the seal ring structure, etching a backside aperture in the first backside passivation layer adjacent to the exterior portion of the seal ring structure, and forming a backside metal pad in the backside aperture to couple the backside metal pad to the exterior portion of the seal ring structure. Semiconductor devices fabricated by such a method are also provided.
公开/授权文献
- US08283754B2 Seal ring structure with metal pad 公开/授权日:2012-10-09
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