发明申请
US20120045368A1 Chemical Coating of Microwell for Electrochemical Detection Device
审中-公开
电化学检测装置的微孔化学涂层
- 专利标题: Chemical Coating of Microwell for Electrochemical Detection Device
- 专利标题(中): 电化学检测装置的微孔化学涂层
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申请号: US13212685申请日: 2011-08-18
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公开(公告)号: US20120045368A1公开(公告)日: 2012-02-23
- 发明人: Wolfgang HINZ , John MAURO , Shifeng LI , James BUSTILLO
- 申请人: Wolfgang HINZ , John MAURO , Shifeng LI , James BUSTILLO
- 申请人地址: US CA CARLSBAD
- 专利权人: LIFE TECHNOLOGIES CORPORATION
- 当前专利权人: LIFE TECHNOLOGIES CORPORATION
- 当前专利权人地址: US CA CARLSBAD
- 主分类号: G01N30/00
- IPC分类号: G01N30/00 ; H01L21/02
摘要:
The described embodiments may provide a method of fabricating a chemical detection device. The method may comprise forming a microwell above a CMOS device. The microwell may comprise a bottom surface and sidewalls. The method may further comprise applying a first chemical to be selectively attached to the bottom surface of the microwell, forming a metal oxide layer on the sidewalls of the microwell, and applying a second chemical to be selectively attached to the sidewalls of the microwell. The second chemical may lack an affinity to the first chemical.
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