发明申请
US20120045719A1 RADIATION-SENSITIVE RESIN COMPOSITION AND COMPOUND 有权
辐射敏感性树脂组合物和化合物

RADIATION-SENSITIVE RESIN COMPOSITION AND COMPOUND
摘要:
A radiation-sensitive resin composition includes an acid-dissociable group-containing resin, and a compound shown by the following general formula (1). wherein Z− represents a monovalent anion shown by a general formula (2), M+ represents a monovalent onium cation, R1 represents a linear or branched alkyl group having 1 to 12 carbon atoms substituted or unsubstantiated with a fluorine atom, or a linear or branched alkoxy group having 1 to 12 carbon atoms, and n is 1 or 2.
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