发明申请
US20120045723A1 VIBRATION ISOLATION DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD USING SAME
审中-公开
振动隔离装置,曝光装置和使用相同装置的装置制造方法
- 专利标题: VIBRATION ISOLATION DEVICE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD USING SAME
- 专利标题(中): 振动隔离装置,曝光装置和使用相同装置的装置制造方法
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申请号: US13207519申请日: 2011-08-11
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公开(公告)号: US20120045723A1公开(公告)日: 2012-02-23
- 发明人: Ryo NAWATA , Katsumi ASADA
- 申请人: Ryo NAWATA , Katsumi ASADA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2010-184616 20100820
- 主分类号: G03B27/00
- IPC分类号: G03B27/00 ; F16M13/00 ; G03F7/20 ; F16F7/00
摘要:
The vibration isolation device of the present invention includes a first position feedback control system including a reference body system that is fixed to an object to be isolated from vibration and includes a reference body; a first driving unit that drives the object with respect to a base; and a first compensator that calculates a command value to the first driving unit based on position information obtained from the reference body system. Also, the reference body system includes a second position feedback control system including a second driving unit that drives the reference body with respect to the object; a first measuring unit that measures the position of the reference body relative to the object; and a second compensator that calculates a command value to the second driving unit based on position information obtained from the first measuring unit. Here, the second compensator is a PD compensator.
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