发明申请
US20120050724A1 PHASE RETRIEVAL SYSTEM FOR ASSESSING DIAMOND-TURNING AND OTHER OPTICAL SURFACE ARTIFACTS
审中-公开
用于评估钻石和其他光学表面物质的相位检测系统
- 专利标题： PHASE RETRIEVAL SYSTEM FOR ASSESSING DIAMOND-TURNING AND OTHER OPTICAL SURFACE ARTIFACTS
- 专利标题（中）： 用于评估钻石和其他光学表面物质的相位检测系统
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申请号： US12872366申请日： 2010-08-31
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公开(公告)号： US20120050724A1公开(公告)日： 2012-03-01
- 发明人: Bruce H. DEAN , Matthew R. Bolar , Alejandro V. Maldonado
- 申请人： Bruce H. DEAN , Matthew R. Bolar , Alejandro V. Maldonado
- 主分类号： G01B9/00
- IPC分类号： G01B9/00 ; G01N21/00
摘要：
A phase retrieval optical metrology system that can be used for evaluating a variety of optical surface errors is provided. The optical metrology system can comprise an optical element defining an optical axis and a focal plane, a fiber coupler coupled to the laser, a fiber connected to the fiber coupler for transmitting light received from the fiber coupler, a collimator for receiving the light received from the fiber and substantially collimating the light to generate a narrowed input light beam, and a defocus element disposed between the optical element and the focal plane.