Invention Application
US20120055796A1 METHOD OF FABRICATING ELECTRODE STRUCTURES ON SUBSTRATE 有权
在基板上制作电极结构的方法

METHOD OF FABRICATING ELECTRODE STRUCTURES ON SUBSTRATE
Abstract:
Methods for fabricating electrode structures on a substrate are presented. The fabrication method includes providing a substrate with a patterned metal layer thereon, defining an electrode area. A passivation glue is formed on the patterned metal layer. An electrode layer is formed in the electrode area. A filling process is performed to deposit nano metal oxides on the electrode layer to extensively fill the entire electrode area.
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