Invention Application
- Patent Title: METHOD OF FORMING AN ELECTROMECHANICAL TRANSDUCER DEVICE
- Patent Title (中): 形成机电传感器装置的方法
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Application No.: US13320579Application Date: 2010-06-15
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Publication No.: US20120056308A1Publication Date: 2012-03-08
- Inventor: Francois Perruchot , Lianjun Liu , Sergio Pacheco , Emmanuel Defay , Patrice Rey
- Applicant: Francois Perruchot , Lianjun Liu , Sergio Pacheco , Emmanuel Defay , Patrice Rey
- Applicant Address: FR Paris US TX Austin
- Assignee: Commissariat A L'Energie Atomique,Freescale Semiconductor, Inc.
- Current Assignee: Commissariat A L'Energie Atomique,Freescale Semiconductor, Inc.
- Current Assignee Address: FR Paris US TX Austin
- Priority: IBPCT/IB2009/053235 20090629
- International Application: PCT/IB2010/001950 WO 20100615
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/66
Abstract:
A method of forming an electromechanical transducer device comprises forming on a fixed structure a movable structure and an actuating structure of the electromechanical transducer device, wherein the movable structure is arranged in operation of the electromechanical transducer device to be movable in relation to the fixed structure in response to actuation of the actuating structure. The method further comprises providing a stress trimming layer on at least part of the movable structure, after providing the stress trimming layer, releasing the movable structure from the fixed structure to provide a released electromechanical transducer device, and after releasing the movable structure changing stress in the stress trimming layer of the released electromechanical transducer device such that the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state.
Public/Granted literature
- US08513042B2 Method of forming an electromechanical transducer device Public/Granted day:2013-08-20
Information query
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