发明申请
US20120058258A1 METHODS OF CLEANING HARD DRIVE DISK SUBSTRATES FOR NANOIMPRINT LITHOGRAPHY
审中-公开
清洁硬盘驱动盘基板的方法NANOIMPRINT LITHOGRAPHY
- 专利标题： METHODS OF CLEANING HARD DRIVE DISK SUBSTRATES FOR NANOIMPRINT LITHOGRAPHY
- 专利标题（中）： 清洁硬盘驱动盘基板的方法NANOIMPRINT LITHOGRAPHY
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申请号： US13227205申请日： 2011-09-07
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公开(公告)号： US20120058258A1公开(公告)日： 2012-03-08
- 发明人: Zhengmao Ye , Rick Ramos
- 申请人： Zhengmao Ye , Rick Ramos
- 申请人地址： US TX Austin
- 专利权人： MOLECULAR IMPRINTS, INC.
- 当前专利权人： MOLECULAR IMPRINTS, INC.
- 当前专利权人地址： US TX Austin
- 主分类号： G11B5/84
- IPC分类号： G11B5/84 ; B08B1/00 ; B05D3/12 ; B05D3/10 ; B05D3/00 ; B08B3/12 ; B08B3/08
摘要：
Post sputter cleaning of hard disk substrates for use in an imprint lithography processes. The cleaning removes contaminants including organic contaminants that otherwise may cause repeating void (non-fill) defects in the imprinted pattern.