发明申请
- 专利标题： RESIST STRIPPING COMPOSITIONS AND METHODS FOR MANUFACTURING ELECTRICAL DEVICES
- 专利标题（中）： 电阻剥离组合物和制造电气装置的方法
-
申请号： US13319187申请日： 2010-04-20
-
公开(公告)号： US20120058644A1公开(公告)日： 2012-03-08
- 发明人: Andreas Klipp
- 申请人： Andreas Klipp
- 申请人地址： DE Ludwigshafen
- 专利权人： BASF SE
- 当前专利权人： BASF SE
- 当前专利权人地址： DE Ludwigshafen
- 国际申请： PCT/EP2010/055205 WO 20100420
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; G03F7/42
摘要：
A liquid composition free from N-alkylpyrrolidones and hydroxyl amine and its derivatives, having a dynamic shear viscosity at 50° C. of from 1 to 10 mPas as measured by rotational viscometry and comprising based on the complete weight of the composition, (A) of from 40 to 99.95% by weight of a polar organic solvent exhibiting in the presence of dissolved tetramethylammonium hydroxide (B) a constant removal rate at 50° C. for a 30 nm thick polymeric barrier anti-reflective layer containing deep UV absorbing chromophoric groups, (B) of from 0.05 to
公开/授权文献
信息查询
IPC分类:
