发明申请
US20120061752A1 SINGLE TRANSISTOR FLOATING-BODY DRAM DEVICES HAVING VERTICAL CHANNEL TRANSISTOR STRUCTURES
失效
具有垂直通道晶体管结构的单晶体浮体体DRAM器件
- 专利标题: SINGLE TRANSISTOR FLOATING-BODY DRAM DEVICES HAVING VERTICAL CHANNEL TRANSISTOR STRUCTURES
- 专利标题(中): 具有垂直通道晶体管结构的单晶体浮体体DRAM器件
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申请号: US13301254申请日: 2011-11-21
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公开(公告)号: US20120061752A1公开(公告)日: 2012-03-15
- 发明人: Zong-Liang Huo , Seung-Jae Baik , In-Seok Yeo , Hong-Sik Yoon , Shi-Eun Kim
- 申请人: Zong-Liang Huo , Seung-Jae Baik , In-Seok Yeo , Hong-Sik Yoon , Shi-Eun Kim
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2005-0037244 20050503
- 主分类号: H01L29/78
- IPC分类号: H01L29/78
摘要:
Single transistor floating-body DRAM devices have a vertical channel transistor structure. The DRAM devices include a substrate, and first and second floating bodies disposed on the substrate and isolated from each other. A source region and a drain region are disposed under and above each of the first and second floating bodies. A gate electrode is disposed between the first and second floating bodies. Methods of fabricating the single transistor floating-body DRAM devices are also provided.
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