发明申请
- 专利标题: MODIFIED DESIGN RULES TO IMPROVE DEVICE PERFORMANCE
- 专利标题(中): 改进设计规范,以提高设备性能
-
申请号: US12879447申请日: 2010-09-10
-
公开(公告)号: US20120061764A1公开(公告)日: 2012-03-15
- 发明人: Annie LUM , Derek C. TAO , Cheng Hung LEE , Chung-Ji LU , Hong-Chen CHENG , Vineet Kumar AGRAWAL , Keun-Young KIM , Pyong Yun CHO
- 申请人: Annie LUM , Derek C. TAO , Cheng Hung LEE , Chung-Ji LU , Hong-Chen CHENG , Vineet Kumar AGRAWAL , Keun-Young KIM , Pyong Yun CHO
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; G06F17/50
摘要:
The layouts, device structures, and methods described above utilize dummy devices to extend the diffusion regions of edge structures and/or non-allowed structures to the dummy device. Such extension of diffusion regions resolves or reduces LOD and edge effect issues. In addition, treating the gate structure of a dummy device next to an edge device also allows only one dummy structure to be added next to the dummy device and saves the real estate on the semiconductor chip. The dummy devices are deactivated and their performance is not important. Therefore, utilizing dummy devices to extend the diffusion regions of edge structures and/or non-allowed structures according to design rules allows the resolution or reduction or LOD and edge effect issues without the penalty of yield reduction or increase in layout areas.
公开/授权文献
- US08519444B2 Modified design rules to improve device performance 公开/授权日:2013-08-27