发明申请
US20120063715A1 MANUFACTURING METHOD FOR ELECTROOPTIC ELEMENT AND OPTICAL DEFLECTOR INCLUDING ELECTROOPTIC ELEMENT 有权
电子元件制造方法及包括电光元件在内的光学偏转器

MANUFACTURING METHOD FOR ELECTROOPTIC ELEMENT AND OPTICAL DEFLECTOR INCLUDING ELECTROOPTIC ELEMENT
摘要:
An electrooptic element includes an optical waveguide layer made from a ferroelectric material and having a polarization inverted region of a predetermined shape having an optical incidence face and an optical exit face, and an upper electrode layer and a lower electrode layer formed on a top face and a bottom face of the optical waveguide layer, respectively, in which the ferroelectric material is magnesium-oxide-doped lithium niobate, and at least one of the optical incidence face and the optical exit face of the optical waveguide layer is formed in parallel with a crystal face of the ferroelectric material.
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