Invention Application
- Patent Title: METHOD OF PRODUCING A PHOTONIC DEVICE AND CORRESPONDING PHOTONIC DEVICE
- Patent Title (中): 制造光电器件和相关光电器件的方法
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Application No.: US13147015Application Date: 2010-02-01
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Publication No.: US20120063717A1Publication Date: 2012-03-15
- Inventor: Laurent Grenouillet , Jean-Marc Fedeli , Liu Liu , Regis Orobtchouk , Philippe Regreny , Gunther Roelkens , Pedro Rojo-Romeo , Dries Van Thourhout
- Applicant: Laurent Grenouillet , Jean-Marc Fedeli , Liu Liu , Regis Orobtchouk , Philippe Regreny , Gunther Roelkens , Pedro Rojo-Romeo , Dries Van Thourhout
- Applicant Address: FR Paris FR Paris
- Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris FR Paris
- Priority: EP09290077.8 20090202
- International Application: PCT/IB10/00414 WO 20100201
- Main IPC: G02B6/122
- IPC: G02B6/122 ; H01L33/02

Abstract:
Method of producing a photonic device including at least one light source and at least one photodetector on a structure including a waveguide layer, this method comprising the following steps: a) growing successively on a substrate (10), a photodetection structure (11) and a light source structure (12), the photodetection structure and the light source structure being made of a stack of layers, the light source layers being stacked on top of the photodetector layers and both structures sharing one of these layers. b) bonding the structure obtained by step a) to the said waveguide structure (2), the light source structure being in contact with the said waveguide structure (2), c) removing the substrate (10) from the structure obtained by step b), d) etching the structure (3) obtained by step c) to define the at least one photodetector (4), e) etching the structure obtained by step d) to define the at least one light source (5), f) forming electrodes (44, 43; 54, 53) on the least one photodetector (4) and on the least one light source (5).
Public/Granted literature
- US08676002B2 Method of producing a photonic device and corresponding photonic device Public/Granted day:2014-03-18
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