发明申请
US20120067145A1 CERAMIC MEMBER, PROBE HOLDER, AND METHOD FOR MANUFACTURING CERAMIC MEMBER
有权
陶瓷会员,探头架,以及制造陶瓷会员的方法
- 专利标题: CERAMIC MEMBER, PROBE HOLDER, AND METHOD FOR MANUFACTURING CERAMIC MEMBER
- 专利标题(中): 陶瓷会员,探头架,以及制造陶瓷会员的方法
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申请号: US13322177申请日: 2010-04-27
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公开(公告)号: US20120067145A1公开(公告)日: 2012-03-22
- 发明人: Kohei Suzuki , Shinya Miyaji , Shinji Saito , Noriyoshi Kaneda
- 申请人: Kohei Suzuki , Shinya Miyaji , Shinji Saito , Noriyoshi Kaneda
- 申请人地址: JP Yokohama-shi
- 专利权人: NHK Spring Co., Ltd.
- 当前专利权人: NHK Spring Co., Ltd.
- 当前专利权人地址: JP Yokohama-shi
- 优先权: JP2009-129438 20090528
- 国际申请: PCT/JP10/57489 WO 20100427
- 主分类号: G01D21/00
- IPC分类号: G01D21/00 ; C04B35/64 ; B32B5/16 ; B32B18/00
摘要:
Provided are a ceramic member being a sintered body including at least forsterite and boron nitride as major components, and in which the boron nitride is oriented in one direction, a probe holder formed by using the ceramic member, and a method for manufacturing the ceramic member. In the ceramic member, the index of orientation preference is equal to or lower than 0.07, and the coefficient of thermal expansion at 20 to 300° C. in a direction parallel to the direction of orientation is (3 to 5)×10−6/° C., or the three-point bending strength based on JIS R 1601 is equal to or higher than 250 MPa.
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