Invention Application
- Patent Title: METHOD FOR ELIMINATING THE METAL CATALYST RESIDUES ON THE SURFACE OF WIRES PRODUCED BY CATALYTIC GROWTH
- Patent Title (中): 用于消除催化生长线上金属催化剂残留物的方法
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Application No.: US13220395Application Date: 2011-08-29
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Publication No.: US20120070964A1Publication Date: 2012-03-22
- Inventor: Simon Perraud , Philippe Coronel
- Applicant: Simon Perraud , Philippe Coronel
- Applicant Address: FR Paris
- Assignee: Commissariat A L'Energie Atomique Et Aux Energies Alternatives
- Current Assignee: Commissariat A L'Energie Atomique Et Aux Energies Alternatives
- Current Assignee Address: FR Paris
- Priority: FR1057595 20100922
- Main IPC: H01L21/20
- IPC: H01L21/20
Abstract:
This method for eliminating the catalyst residues present on the surface of solid structures made from a first material and obtained by catalytic growth, includes the following steps: catalytic growth, from the catalyst residues, of solid structures made from a second material; selective elimination of said solid structures made from a second material.
Public/Granted literature
- US08669171B2 Method for eliminating the metal catalyst residues on the surface of wires produced by catalytic growth Public/Granted day:2014-03-11
Information query
IPC分类:
