Selective Chemical Etching Process
    2.
    发明申请
    Selective Chemical Etching Process 有权
    选择性化学蚀刻工艺

    公开(公告)号:US20140302633A1

    公开(公告)日:2014-10-09

    申请号:US14002261

    申请日:2012-03-01

    IPC分类号: H01L31/18

    摘要: The present invention relates to a process for selective wet chemical etching of a thin-film substrate comprising a CIGS surface layer. The present invention also relates to a process for producing cells in series for thin-film photovoltaic modules, which process implements the selective wet chemical etching process according to the invention. The present invention furthermore relates to a process for creating small patterns, such as for example monolithic interconnects, in thin-film photovoltaic devices, which process implements the selective wet chemical etching process according to the invention.

    摘要翻译: 本发明涉及包含CIGS表面层的薄膜基材的选择性湿化学蚀刻方法。 本发明还涉及用于薄膜光伏模块串联制造电池的方法,该方法实现了根据本发明的选择性湿化学蚀刻工艺。 本发明还涉及一种用于在薄膜光伏器件中产生小图案(例如单片互连)的方法,该方法实现了根据本发明的选择性湿化学蚀刻工艺。

    Selective chemical etching process
    5.
    发明授权
    Selective chemical etching process 有权
    选择性化学蚀刻工艺

    公开(公告)号:US09076918B2

    公开(公告)日:2015-07-07

    申请号:US14002261

    申请日:2012-03-01

    摘要: The present invention relates to a process for selective wet chemical etching of a thin-film substrate comprising a CIGS surface layer. The present invention also relates to a process for producing cells in series for thin-film photovoltaic modules, which process implements the selective wet chemical etching process according to the invention. The present invention furthermore relates to a process for creating small patterns, such as for example monolithic interconnects, in thin-film photovoltaic devices, which process implements the selective wet chemical etching process according to the invention.

    摘要翻译: 本发明涉及包含CIGS表面层的薄膜基材的选择性湿化学蚀刻方法。 本发明还涉及用于薄膜光伏模块串联制造电池的方法,该方法实现了根据本发明的选择性湿化学蚀刻工艺。 本发明还涉及一种用于在薄膜光伏器件中产生小图案(例如单片互连)的方法,该方法实现了根据本发明的选择性湿化学蚀刻工艺。

    CATHODE SPUTTER DEPOSITION OF A Cu(In,Ga)X2 THIN FILM
    8.
    发明申请
    CATHODE SPUTTER DEPOSITION OF A Cu(In,Ga)X2 THIN FILM 审中-公开
    Cu(In,Ga)X2薄膜的阴极溅射沉积

    公开(公告)号:US20130015057A1

    公开(公告)日:2013-01-17

    申请号:US13513328

    申请日:2010-11-29

    IPC分类号: C23C14/34 C23C14/14

    摘要: A method and device for the deposition of a film made of a semiconductive material having the formula Cu(In, Ga)X2, where X is S or Se, involves cathode sputter deposition of Cu, In, and Ga onto at least one surface of a substrate and simultaneous deposition of X in vapor phase onto the surface in a cathode chamber. A vapor form of X or its precursor is moved in a first laminar gas flow parallel to and in contact with the surface, and is simultaneously moved in a second laminar gas flow for inert gas parallel to the first laminar gas flow and located between the first laminar gas flow and a sputtering target(s), to confine the first laminar gas flow to the area around the substrate.

    摘要翻译: 用于沉积由具有式Cu(In,Ga)X2的半导体材料制成的膜的方法和装置,其中X是S或Se,包括将Cu,In和Ga阴极溅射沉积到至少一个表面上 衬底,并将X在汽相中同时沉积到阴极室中的表面上。 X或其前体的蒸汽形式在与该表面平行并与其接触的第一层流气流中移动,同时在与第一层流气流平行的位于第一层流气流之间的惰性气体的第二层流气流中移动, 层流气流和溅射靶,以将第一层流气体限制在衬底周围的区域。