发明申请
- 专利标题: POLISHING PAD FOR CHEMICAL MECHANICAL POLISHING APPARATUS
- 专利标题(中): 化学机械抛光设备抛光垫
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申请号: US13233715申请日: 2011-09-15
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公开(公告)号: US20120071068A1公开(公告)日: 2012-03-22
- 发明人: Ah-Ram KIM , Byeong-In AHN , Dong-Mok SHIN
- 申请人: Ah-Ram KIM , Byeong-In AHN , Dong-Mok SHIN
- 申请人地址: KR Seoul
- 专利权人: LG CHEM, LTD.
- 当前专利权人: LG CHEM, LTD.
- 当前专利权人地址: KR Seoul
- 优先权: KR10-2010-0090747 20100915
- 主分类号: B24D11/00
- IPC分类号: B24D11/00 ; B24B53/017
摘要:
This disclosure relates to a polishing pad for chemical mechanical polishing, having a shape where 3 or more semi-oval or semicircular curves that connect 2 valleys neighboring on the plane are connected, and including 2 or more modified patterns that are formed to a determined thickness on the polishing pad, wherein a peak of one modified pattern and a valley of another modified pattern neighboring thereto are sequentially located on the same line. The polishing pad may uniformly disperse slurry over the whole area during a polishing process to provide improved polishing uniformity, and appropriately control residence time of the slurry to increase polishing rate.
公开/授权文献
- US08920220B2 Polishing pad for chemical mechanical polishing apparatus 公开/授权日:2014-12-30
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