发明申请
US20120071068A1 POLISHING PAD FOR CHEMICAL MECHANICAL POLISHING APPARATUS 有权
化学机械抛光设备抛光垫

POLISHING PAD FOR CHEMICAL MECHANICAL POLISHING APPARATUS
摘要:
This disclosure relates to a polishing pad for chemical mechanical polishing, having a shape where 3 or more semi-oval or semicircular curves that connect 2 valleys neighboring on the plane are connected, and including 2 or more modified patterns that are formed to a determined thickness on the polishing pad, wherein a peak of one modified pattern and a valley of another modified pattern neighboring thereto are sequentially located on the same line. The polishing pad may uniformly disperse slurry over the whole area during a polishing process to provide improved polishing uniformity, and appropriately control residence time of the slurry to increase polishing rate.
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